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Characterization of Surface Topometry and Determination of Layer Thickness by Scanning White Light Interference Microscopy

  • 3D coherence scanning interferometry (CSI) is an optical, non-contact and rapide measurement technique using a defined bandwidth of white light at normal incidence. Based on this operational principle, white light interference microscopy (WLIM) provides three-dimensional surface topometry data up to a resolution of 0.4 μm lateral and 0.1 nm vertical. Three operating modi, i.e. surface, films and advanced films, enable measurements of step heights, roughness, wear volume, cone angle, surface pattern and layer thickness of transparent coatings. The determination of layer thickness by WLIM requires the knowledge of optical constants, i.e.the refractive index n and the extinction coefficient k. For technical surfaces, data base values - if available at all - have to be determined or validated by spectroscopic ellipsometry (SE). From this oblique incidence technique both optical constants and layer thickness can be derived based on a model for at least semi-transparent coatings. For3D coherence scanning interferometry (CSI) is an optical, non-contact and rapide measurement technique using a defined bandwidth of white light at normal incidence. Based on this operational principle, white light interference microscopy (WLIM) provides three-dimensional surface topometry data up to a resolution of 0.4 μm lateral and 0.1 nm vertical. Three operating modi, i.e. surface, films and advanced films, enable measurements of step heights, roughness, wear volume, cone angle, surface pattern and layer thickness of transparent coatings. The determination of layer thickness by WLIM requires the knowledge of optical constants, i.e.the refractive index n and the extinction coefficient k. For technical surfaces, data base values - if available at all - have to be determined or validated by spectroscopic ellipsometry (SE). From this oblique incidence technique both optical constants and layer thickness can be derived based on a model for at least semi-transparent coatings. For different layer thicknesses, a comparison is made between WLIM and SE. Measurement uncertainty is discussed for both topometric features and layer thickness for different use cases. Traceability to SI system is ensured by certified standards (PTB/NIST) within a DAkkS DIN EN ISO/IEC 17025:2018 accredited lab.zeige mehrzeige weniger

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Metadaten
Autor*innen:Matthias Weise
Koautor*innen:Andreas Hertwig, Uwe Beck
Dokumenttyp:Posterpräsentation
Veröffentlichungsform:Präsentation
Sprache:Englisch
Jahr der Erstveröffentlichung:2020
Organisationseinheit der BAM:6 Materialchemie
6 Materialchemie / 6.7 Materialsynthese und Design
DDC-Klassifikation:Naturwissenschaften und Mathematik / Chemie / Analytische Chemie
Freie Schlagwörter:Lateral surface pattern; Layer thickness of transparent coatings; Rroughness and step heights; Scanning white light interferometry; Spectroscopic ellipsometry
Themenfelder/Aktivitätsfelder der BAM:Chemie und Prozesstechnik
Veranstaltung:17th International Conference on Plasma Surface Engineering (PSE)
Veranstaltungsort:Erfurt, Germany
Beginndatum der Veranstaltung:07.09.2020
Enddatum der Veranstaltung:10.09.2020
Verfügbarkeit des Dokuments:Datei im Netzwerk der BAM verfügbar ("Closed Access")
Datum der Freischaltung:28.09.2020
Referierte Publikation:Nein
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