A method to test the performance of an energy-dispersive X-ray spectrometer (EDS)
- A test material for routine performance evaluation of energy-dispersive X-ray spectrometers (EDS) is presented. It consists of a synthetic, thick coating of C, Al, Mn, Cu, and Zr, in an elemental composition that provides interference-free characteristic X-ray lines of similar intensities at 10 kV scanning electron microscope voltage. The EDS energy resolution at the C-K, Mn-Lα, Cu-Lα, Al-K, Zr-Lα, and Mn-Kα lines, the calibration state of the energy scale, and the Mn-Lα/Mn-Kα intensity ratio as a measure for the low-energy detection efficiency are calculated by a dedicated software package from the 10 kV spectrum. Measurements at various input count rates and processor shaping times enable an estimation of the operation conditions for which the X-ray spectrum is not yet corrupted by pile-up events. Representative examples of EDS systems characterized with the test material and the related software are presented and discussed.
Autor*innen: | Vasile-Dan HodoroabaORCiD, M. Procop |
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Dokumenttyp: | Zeitschriftenartikel |
Veröffentlichungsform: | Verlagsliteratur |
Sprache: | Englisch |
Titel des übergeordneten Werkes (Englisch): | Microscopy and microanalysis |
Jahr der Erstveröffentlichung: | 2014 |
Herausgeber (Institution): | Microscopy Society of America |
Verlag: | Cambridge University Press |
Verlagsort: | New York, NY |
Jahrgang/Band: | 20 |
Ausgabe/Heft: | 05 |
Erste Seite: | 1556 |
Letzte Seite: | 1564 |
Freie Schlagwörter: | Energy resolution; Energy-dispersive X-ray spectrometer (EDS); Energy-dispersive X-ray spectroscopy (EDX, XEDS); ISO 15632; Performance check; Scanning electron microscope (SEM); Test material |
DOI: | 10.1017/S1431927614001652 |
ISSN: | 1431-9276 |
ISSN: | 1435-8115 |
Verfügbarkeit des Dokuments: | Datei im Netzwerk der BAM verfügbar ("Closed Access") |
Datum der Freischaltung: | 20.02.2016 |
Referierte Publikation: | Ja |
Datum der Eintragung als referierte Publikation: | 08.10.2014 |