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Advancements in pressure-assisted sintering technology for low temperature co-fired ceramics (LTCC)

  • Steadily increasing demands on design and dimensional accuracy of ceramic multilayer modules, as well as the processing of new materials, require continuous improvements of manufacturing technology, especially thermal processes. The capabilities of pressure-assisted sintering (PAS) for the manufacturing of highly integrated low temperature co-fired ceramics (LTCC) multilayer have been considerably extended in the last years by procedural and device-related advancements. A lambda probe has been integrated in a sintering press prototype to monitor and control the process atmosphere. Thereby, the development of oxygen partial pressure during binder burnout of real modules can be observed. On the other hand, the oxygen partial pressure can be regulated during densification, for example to prevent diffusion of silver from circuit paths into the surrounding LTCC. Thin-film capable surfaces can be produced without post-processing by using setter plates made of glass-like carbon in an advancedSteadily increasing demands on design and dimensional accuracy of ceramic multilayer modules, as well as the processing of new materials, require continuous improvements of manufacturing technology, especially thermal processes. The capabilities of pressure-assisted sintering (PAS) for the manufacturing of highly integrated low temperature co-fired ceramics (LTCC) multilayer have been considerably extended in the last years by procedural and device-related advancements. A lambda probe has been integrated in a sintering press prototype to monitor and control the process atmosphere. Thereby, the development of oxygen partial pressure during binder burnout of real modules can be observed. On the other hand, the oxygen partial pressure can be regulated during densification, for example to prevent diffusion of silver from circuit paths into the surrounding LTCC. Thin-film capable surfaces can be produced without post-processing by using setter plates made of glass-like carbon in an advanced PAS process under nitrogen. A newly developed advancement of this approach enables in-situ hot-embossing of LTCC during PAS by using structured glass-like carbon molds. The prototype press is further extended by a sensitive displacement transducer for monitoring the thickness shrinkage of real modules with an edge length of up to 8 inch.zeige mehrzeige weniger

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Metadaten
Autoren/innen:Björn Mieller
Koautoren/innen:V. Rangelov, Torsten Rabe
Dokumenttyp:Vortrag
Veröffentlichungsform:Präsentation
Sprache:Englisch
Jahr der Erstveröffentlichung:2016
Organisationseinheit der BAM:5 Werkstofftechnik
5 Werkstofftechnik / 5.5 Technische Keramik
DDC-Klassifikation:Technik, Medizin, angewandte Wissenschaften / Ingenieurwissenschaften / Ingenieurwissenschaften und zugeordnete Tätigkeiten
Freie Schlagwörter:Hot-embossing; LTCC; Oxygen partial pressure; Shrinkage measurement
Themenfelder/Aktivitätsfelder der BAM:Material
Veranstaltung:ICC6
Veranstaltungsort:Dresden, Germany
Beginndatum der Veranstaltung:21.08.2016
Enddatum der Veranstaltung:25.08.2016
Verfügbarkeit des Dokuments:Datei im Netzwerk der BAM verfügbar ("Closed Access")
Datum der Freischaltung:01.09.2016
Referierte Publikation:Nein