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Lateral resolution of nanoscaled images delivered by surface-analytical instruments: application of the BAM-L200 certified reference material and related ISO standards

  • The certified reference material BAM-L200, a nanoscale stripe pattern for length calibration and specification of lateral resolution, is described. BAM-L200 is prepared from a cross-sectioned epitaxially grown layer stack of AlxGa1–xAs and InxGa1–xAs on a GaAs substrate. The surface of BAM-L200 provides a flat pattern with stripe widths ranging down to 1 nm. Calibration distances, grating periods and stripe widths have been certified by TEM with traceability to the length unit. The combination of gratings, isolated narrow stripes and sharp edges of wide stripes offers plenty of options for the determination of lateral resolution, sharpness and calibration of length scale at selected settings of imaging surface-analytical instruments. The feasibility of the reference material for an analysis of the lateral resolution is demonstrated in detail by evaluation of ToF-SIMS, AES and EDX images. Other applications developed in the community are summarized, too. BAM-L200 fully supports theThe certified reference material BAM-L200, a nanoscale stripe pattern for length calibration and specification of lateral resolution, is described. BAM-L200 is prepared from a cross-sectioned epitaxially grown layer stack of AlxGa1–xAs and InxGa1–xAs on a GaAs substrate. The surface of BAM-L200 provides a flat pattern with stripe widths ranging down to 1 nm. Calibration distances, grating periods and stripe widths have been certified by TEM with traceability to the length unit. The combination of gratings, isolated narrow stripes and sharp edges of wide stripes offers plenty of options for the determination of lateral resolution, sharpness and calibration of length scale at selected settings of imaging surface-analytical instruments. The feasibility of the reference material for an analysis of the lateral resolution is demonstrated in detail by evaluation of ToF-SIMS, AES and EDX images. Other applications developed in the community are summarized, too. BAM-L200 fully supports the implementation of the revised International Standard ISO 18516 (in preparation) which is based on knowledge outlined in the Technical Report ISO/TR 19319:2013.zeige mehrzeige weniger

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Metadaten
Autoren/innen:Mathias Senoner, A. Maaßdorf, Heidemarie Rooch, Werner ÖsterleORCiD, M. Malcher, M. Schmidt, F. Kollmer, D. Paul, Vasile-Dan Hodoroaba, Steffi Rades, Wolfgang Unger
Dokumenttyp:Zeitschriftenartikel
Veröffentlichungsform:Verlagsliteratur
Sprache:Englisch
Titel des übergeordneten Werkes (Englisch):Analytical and bioanalytical chemistry
Jahr der Erstveröffentlichung:2015
Organisationseinheit der BAM:5 Werkstofftechnik
5 Werkstofftechnik / 5.1 Materialographie, Fraktographie und Alterung technischer Werkstoffe
6 Materialschutz und Oberflächentechnik
6 Materialschutz und Oberflächentechnik / 6.1 Oberflächenanalytik und Grenzflächenchemie
Verlag:Springer
Verlagsort:Berlin
Jahrgang/Band:407
Ausgabe/Heft:11
Erste Seite:3211
Letzte Seite:3217
Freie Schlagwörter:AES; BAM-L200; CRM; Certified reference material; EDX; Imaging; Imaging surface analysis; Lateral resolution; STXM; Sharpness; Standardisation; ToF-SIMS; XPEEM; XPS
DOI:https://doi.org/10.1007/s00216-014-8135-7
ISSN:1618-2642
ISSN:1618-2650
Verfügbarkeit des Volltexts:Volltext-PDF im Netzwerk der BAM verfügbar ("Closed Access")
Datum der Freischaltung:20.02.2016
Referierte Publikation:Ja
Datum der Eintragung als referierte Publikation:16.04.2015