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Integration of screen-printed tunable BST thick films in LTCC modules for microwave applications

  • Reconfigurable microwave components play an important role in modern communication systems to meet the increasing demands for functionality and flexibility of the systems. Various technologies, such as semiconductor technology, microelectromechanical systems (MEMS) or ferroelectric thin and thick films, are suitable for the realization of tunable microwave components. Ferroelectric materials are characterized by high tuning speeds, negligible power consumption and low manufacturing costs. In particular, ferroelectric thick films based on barium strontium titanate (BaxSr1-xTiO3, BST) are promising systems for use in the frequency range up to approx. 12 GHz. However, due to the high sintering temperatures above 1100°C for pure BST thick films, the fabrication of tunable components based on silver or gold electrodes is limited to planar structures, which are applied after the sintering process. In this presentation, it will be shown the development of BST-ZnO-B2O3 composite materialsReconfigurable microwave components play an important role in modern communication systems to meet the increasing demands for functionality and flexibility of the systems. Various technologies, such as semiconductor technology, microelectromechanical systems (MEMS) or ferroelectric thin and thick films, are suitable for the realization of tunable microwave components. Ferroelectric materials are characterized by high tuning speeds, negligible power consumption and low manufacturing costs. In particular, ferroelectric thick films based on barium strontium titanate (BaxSr1-xTiO3, BST) are promising systems for use in the frequency range up to approx. 12 GHz. However, due to the high sintering temperatures above 1100°C for pure BST thick films, the fabrication of tunable components based on silver or gold electrodes is limited to planar structures, which are applied after the sintering process. In this presentation, it will be shown the development of BST-ZnO-B2O3 composite materials for reducing the sintering temperature to 850-900°C. Furthermore, the material and component properties of these composites or rather corresponding MIM (metal-insulator-metal) varactors are presented and compared to planar-structured varactors. The LTCC integration potential of such fully screen-printed MIM varactors based on the developed low sintering BST composites are investigated by the fabrication of phase shifters embedded in LTCC modules.zeige mehrzeige weniger

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Metadaten
Autoren/innen:J. R. Binder
Koautoren/innen:Ch. Kohler, M. Nikfalazar, H. Maune, R. Jakoby, Andreas Heunisch, Bärbel Schulz, Torsten Rabe
Dokumenttyp:Vortrag
Veröffentlichungsform:Präsentation
Sprache:Englisch
Jahr der Erstveröffentlichung:2017
Organisationseinheit der BAM:5 Werkstofftechnik
5 Werkstofftechnik / 5.5 Technische Keramik
DDC-Klassifikation:Technik, Medizin, angewandte Wissenschaften / Ingenieurwissenschaften / Ingenieurwissenschaften und zugeordnete Tätigkeiten
Freie Schlagwörter:Dialectric materials; Microwave application; Phase shifter; Screen printing
Themenfelder/Aktivitätsfelder der BAM:Material
Material / Materialien und Stoffe
Veranstaltung:European Ceramic Society Conference
Veranstaltungsort:Budapest, Hungary
Beginndatum der Veranstaltung:09.07.2017
Enddatum der Veranstaltung:13.07.2017
Verfügbarkeit des Dokuments:Datei im Netzwerk der BAM verfügbar ("Closed Access")
Datum der Freischaltung:22.08.2017
Referierte Publikation:Nein