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Sample preparation for analytical scanning electron microscopy using initial notch sectioning

  • A novel method for broad ion beam based sample sectioning using the concept of initial notches is presented. An adapted sample geometry is utilized in order to create terraces with a well-define d step in erosion depth from the surface. The method consists of milling a notch into the surface, followed by glancing-angle ion beam erosion, which leads to preferential erosion at the notch due to increased local surface elevation. The process of terrace formation can be utilized in sample preparation for analytical scanning electron microscopy in order to get efficient access to the depth-dependent microstructure of a material. It is demonstrated that the method can be applied to both conducting and non-conducting specimens. Furthermore, experimental parameters influencing the preparation success are determined. Finally, as a proof-of-concept, an electron backscatter diffraction study on a surface crystallized diopside glass ceramic is performed, where the method is used to analyzeA novel method for broad ion beam based sample sectioning using the concept of initial notches is presented. An adapted sample geometry is utilized in order to create terraces with a well-define d step in erosion depth from the surface. The method consists of milling a notch into the surface, followed by glancing-angle ion beam erosion, which leads to preferential erosion at the notch due to increased local surface elevation. The process of terrace formation can be utilized in sample preparation for analytical scanning electron microscopy in order to get efficient access to the depth-dependent microstructure of a material. It is demonstrated that the method can be applied to both conducting and non-conducting specimens. Furthermore, experimental parameters influencing the preparation success are determined. Finally, as a proof-of-concept, an electron backscatter diffraction study on a surface crystallized diopside glass ceramic is performed, where the method is used to analyze orientation dependent crystal growth phenomena occurring during growth of surface crystals into the bulk.zeige mehrzeige weniger

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Metadaten
Autor*innen:R. Busch, Christopher TielemannORCiD, Stefan ReinschORCiD, Ralf Müller, C. Patzig, M. Krause, T. Höche
Dokumenttyp:Zeitschriftenartikel
Veröffentlichungsform:Verlagsliteratur
Sprache:Englisch
Titel des übergeordneten Werkes (Englisch):Micron
Jahr der Erstveröffentlichung:2021
Organisationseinheit der BAM:5 Werkstofftechnik
5 Werkstofftechnik / 5.6 Glas
Verlag:Elsevier B.V.
Jahrgang/Band:150
Aufsatznummer:3090
DDC-Klassifikation:Technik, Medizin, angewandte Wissenschaften / Ingenieurwissenschaften / Ingenieurwissenschaften und zugeordnete Tätigkeiten
Freie Schlagwörter:3D etching; Analytical scanning electron microscopy; Diopsid; EBSD; Glass; Glass Ceramic; Ion beam erosion Sectioning; SEM; Sample preparation
Themenfelder/Aktivitätsfelder der BAM:Material
Material / Nano
DOI:10.1016/j.micron.2021.103090
ISSN:0968-4328
Verfügbarkeit des Dokuments:Datei im Netzwerk der BAM verfügbar ("Closed Access")
Datum der Freischaltung:09.08.2021
Referierte Publikation:Ja
Datum der Eintragung als referierte Publikation:23.08.2021
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