X-ray fluorescence as an additional analytical method for a scanning electron microscope
- Energy dispersive and wavelength dispersive X-ray spectrometry are used to determine the composition of a specimen in a scanning electron microscope (SEM) by electron probe microanalysis (EPMA). A valuable completion for the SEM is analysis by X-ray fluorescence (XRFA). The main advantage of this method consists in its low detection limit. XRFA with a SEM uses the same spectrometers as for EPMA, necessary are only an additional X-ray source for the excitation of fluorescence spectra and software for their evaluation. Recent developments of smart low-power X-ray tubes and X-ray optical components enabled the construction of compact X-ray sources with focussing properties as add-on for a SEM. For quantitative XRFA the source spectrum has to be known. For its calculation the X-ray production yields Y have been measured for the commonly used tube target materials Mo, Rh and W. The excitation spectra were calculated for a variety of source types and compared with respect to the achievableEnergy dispersive and wavelength dispersive X-ray spectrometry are used to determine the composition of a specimen in a scanning electron microscope (SEM) by electron probe microanalysis (EPMA). A valuable completion for the SEM is analysis by X-ray fluorescence (XRFA). The main advantage of this method consists in its low detection limit. XRFA with a SEM uses the same spectrometers as for EPMA, necessary are only an additional X-ray source for the excitation of fluorescence spectra and software for their evaluation. Recent developments of smart low-power X-ray tubes and X-ray optical components enabled the construction of compact X-ray sources with focussing properties as add-on for a SEM. For quantitative XRFA the source spectrum has to be known. For its calculation the X-ray production yields Y have been measured for the commonly used tube target materials Mo, Rh and W. The excitation spectra were calculated for a variety of source types and compared with respect to the achievable photon flux and its spectral distribution.…
MetadatenAutor*innen: | Mathias ProcopORCiD, Vasile-Dan HodoroabaORCiD |
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Dokumenttyp: | Zeitschriftenartikel |
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Veröffentlichungsform: | Verlagsliteratur |
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Sprache: | Englisch |
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Titel des übergeordneten Werkes (Englisch): | Microchimica acta |
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Jahr der Erstveröffentlichung: | 2008 |
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Verlag: | Springer |
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Verlagsort: | Wien |
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Jahrgang/Band: | 161 |
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Ausgabe/Heft: | 3-4 |
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Erste Seite: | 413 |
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Letzte Seite: | 419 |
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Freie Schlagwörter: | Analytical SEM; Scanning electron microscopy; X-ray fluorescence analysis; X-ray optics; X-ray production yield; X-ray spectroscopy; X-ray tube spectrum; XRF |
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DOI: | 10.1007/s00604-007-0854-4 |
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ISSN: | 0026-3672 |
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ISSN: | 1436-5073 |
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Verfügbarkeit des Dokuments: | Physisches Exemplar in der Bibliothek der BAM vorhanden ("Hardcopy Access") |
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Bibliotheksstandort: | Sonderstandort: Publica-Schrank |
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Datum der Freischaltung: | 19.02.2016 |
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Referierte Publikation: | Ja |
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Datum der Eintragung als referierte Publikation: | 05.06.2008 |
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