Characterization of Pd-Ni-Co alloy thin films by ED-EPMA with application of the STRATAGEM software
- Ternary thin film alloys based on Pd, Ni and Co on silicon wafers have been characterized in order to determine elemental composition and thickness. A broad variety of alloy compositions was obtained on one and the same substrate by magnetron dc-co-sputter deposition. Energy-dispersive electron probe X-ray microanalysis of these 'multi' alloy composition samples is performed in a non-destructive, precise and, if optimized, also in a time-saving way. The local thickness of the layers under study was in between 50 nm and 250 nm. Pure element bulk materials have been employed as reference specimens. The results attained in this study are compared to those obtained by other analytical methods as Auger electron spectroscopy and X-ray photo electron spectroscopy.
Autor*innen: | Julius Kühn, Vasile-Dan HodoroabaORCiD, S. Linke, W. Moritz, Wolfgang UngerORCiD |
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Dokumenttyp: | Zeitschriftenartikel |
Veröffentlichungsform: | Verlagsliteratur |
Sprache: | Englisch |
Titel des übergeordneten Werkes (Englisch): | Surface and interface analysis |
Jahr der Erstveröffentlichung: | 2012 |
Verlag: | Wiley |
Verlagsort: | Chichester |
Jahrgang/Band: | 44 |
Ausgabe/Heft: | 11-12 |
Erste Seite: | 1456 |
Letzte Seite: | 1458 |
Freie Schlagwörter: | ED-EPMA; Elemental composition; Film thickness; K-values; Quantification; STRATAGEM; Ternary alloys |
DOI: | 10.1002/sia.4974 |
ISSN: | 0142-2421 |
ISSN: | 1096-9918 |
Verfügbarkeit des Dokuments: | Physisches Exemplar in der Bibliothek der BAM vorhanden ("Hardcopy Access") |
Bibliotheksstandort: | Sonderstandort: Publica-Schrank |
Datum der Freischaltung: | 20.02.2016 |
Referierte Publikation: | Ja |
Datum der Eintragung als referierte Publikation: | 06.12.2012 |