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The European nanometrology landscape

  • This review paper summarizes the European nanometrology landscape from a technical perspective. Dimensional and chemical nanometrology are discussed first as they underpin many of the developments in other areas of nanometrology. Applications for the measurement of thin film parameters are followed by two of the most widely relevant families of functional properties: measurement of mechanical and electrical properties at the nanoscale. Nanostructured materials and surfaces, which are seen as key materials areas having specific metrology challenges, are covered next. The final section describes biological nanometrology, which is perhaps the most interdisciplinary applications area, and presents unique challenges. Within each area, a review is provided of current status, the capabilities and limitations of current techniques and instruments, and future directions being driven by emerging industrial measurement requirements. Issues of traceability, standardization, national andThis review paper summarizes the European nanometrology landscape from a technical perspective. Dimensional and chemical nanometrology are discussed first as they underpin many of the developments in other areas of nanometrology. Applications for the measurement of thin film parameters are followed by two of the most widely relevant families of functional properties: measurement of mechanical and electrical properties at the nanoscale. Nanostructured materials and surfaces, which are seen as key materials areas having specific metrology challenges, are covered next. The final section describes biological nanometrology, which is perhaps the most interdisciplinary applications area, and presents unique challenges. Within each area, a review is provided of current status, the capabilities and limitations of current techniques and instruments, and future directions being driven by emerging industrial measurement requirements. Issues of traceability, standardization, national and international programmes, regulation and skills development will be discussed in a future paper.zeige mehrzeige weniger

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Autor*innen:R.K. Leach, R. Boyd, T. Burke, H.-U. Danzebrink, K. Dirscherl, T. Dziomba, M. Gee, L. Koenders, V. Morazzani, A. Pidduck, D. Roy, Wolfgang UngerORCiD, A. Yacoot
Dokumenttyp:Zeitschriftenartikel
Veröffentlichungsform:Verlagsliteratur
Sprache:Englisch
Titel des übergeordneten Werkes (Englisch):Nanotechnology
Jahr der Erstveröffentlichung:2011
Verlag:IOP Publishing Ltd.
Verlagsort:Bristol
Jahrgang/Band:22
Ausgabe/Heft:6
Erste Seite:062001-1 - 062001-15
Freie Schlagwörter:Chemistry; Metrology; Nanotechnology; Surface analysis
DOI:10.1088/0957-4484/22/6/062001
ISSN:0957-4484
ISSN:1361-6528
Verfügbarkeit des Dokuments:Datei im Netzwerk der BAM verfügbar ("Closed Access")
Datum der Freischaltung:19.02.2016
Referierte Publikation:Ja
Datum der Eintragung als referierte Publikation:17.02.2011
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