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Characterisation of nanoparticles by means of high-resolution SEM/EDS in transmission mode
- Advances in scanning electron microscopy (SEM) enable the high-resolution imaging of single nanoparticles (NPs) with sizes well below 10 nm. The SEM analysis in transmission mode (T-SEM) of NPs on thin film supports has many benefits when compared to the analysis of NPs on bulk substrates. The enhanced material (mass – thickness) contrast of the T-SEM imaging mode is well suited for in-depth and, particularly valuable, to very accurate, traceable, lateral dimensional measurements of NPs. Compared to samples prepared on bulk substrates, T-SEM with energy dispersive X-ray spectroscopy (EDS) achieves a drastically improved spatial resolution of the emitted X-rays. The poor signal-to-noise ratio of the X-ray spectra emitted by a single nanoparticle (NP) can be improved by the use of high-sensitivity (high collection solid angle) silicon drift (SDD), energy-dispersive X-ray spectrometers (EDS). The EDS spectral imaging of a single NP with a spatial resolution below 10 nm has becomeAdvances in scanning electron microscopy (SEM) enable the high-resolution imaging of single nanoparticles (NPs) with sizes well below 10 nm. The SEM analysis in transmission mode (T-SEM) of NPs on thin film supports has many benefits when compared to the analysis of NPs on bulk substrates. The enhanced material (mass – thickness) contrast of the T-SEM imaging mode is well suited for in-depth and, particularly valuable, to very accurate, traceable, lateral dimensional measurements of NPs. Compared to samples prepared on bulk substrates, T-SEM with energy dispersive X-ray spectroscopy (EDS) achieves a drastically improved spatial resolution of the emitted X-rays. The poor signal-to-noise ratio of the X-ray spectra emitted by a single nanoparticle (NP) can be improved by the use of high-sensitivity (high collection solid angle) silicon drift (SDD), energy-dispersive X-ray spectrometers (EDS). The EDS spectral imaging of a single NP with a spatial resolution below 10 nm has become possible. This is demonstrated by means of various examples of nanostructures. Advanced data processing of T-SEM/EDS results sets the stage for the automated classification of NPs by feature analysis. This method combines the detection of morphological structures of interest by image processing of T-SEM micrographs with the chemical classification by EDS.…
Autor*innen: | Vasile-Dan HodoroabaORCiD, Steffi Rades, T. Salge, Johannes Mielke, Erik Ortel, R. Schmidt |
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Dokumenttyp: | Zeitschriftenartikel |
Veröffentlichungsform: | Verlagsliteratur |
Sprache: | Englisch |
Titel des übergeordneten Werkes (Englisch): | IOP Conf. Series: Materials Science and Engineering |
Jahr der Erstveröffentlichung: | 2016 |
Veröffentlichende Institution: | Bundesanstalt für Materialforschung und -prüfung (BAM) |
Herausgeber (Institution): | IOP Publishing Ltd |
Verlag: | IOP Publishing Ltd |
Verlagsort: | Bristol, UK |
Jahrgang/Band: | 109 |
Erste Seite: | 012006-1 |
Letzte Seite: | 012006-12 |
DDC-Klassifikation: | Naturwissenschaften und Mathematik / Chemie / Analytische Chemie |
Technik, Medizin, angewandte Wissenschaften / Ingenieurwissenschaften / Ingenieurwissenschaften und zugeordnete Tätigkeiten | |
Freie Schlagwörter: | EDX; High-resolution; Nanoparticles; SEM; T-SEM |
Veranstaltung: | European Microbeam Analysis Society’s 14th European Workshop on Modern Developments and Applications in Microbeam Analysis (EMAS 2015) |
Veranstaltungsort: | Portorož, Slovenia |
Beginndatum der Veranstaltung: | 03.05.2015 |
Enddatum der Veranstaltung: | 07.05.2015 |
DOI: | 10.1088/1757-899X/109/1/012006 |
URN: | urn:nbn:de:kobv:b43-355628 |
URL: | http://iopscience.iop.org/article/10.1088/1757-899X/109/1/012006 |
ISSN: | 1757-899X |
Verfügbarkeit des Dokuments: | Datei für die Öffentlichkeit verfügbar ("Open Access") |
Lizenz (Deutsch): | Creative Commons - Namensnennung |
Datum der Freischaltung: | 29.03.2016 |
Referierte Publikation: | Ja |
Datum der Eintragung als referierte Publikation: | 30.09.2016 |
Schriftenreihen ohne Nummerierung: | Wissenschaftliche Artikel der BAM |