Characterisation of nanoparticles by means of high-resolution SEM/EDS
- Advances in scanning electron microscopy (SEM) enable the high-resolution imaging of single nanoparticles (NPs) with sizes well below 10 nm. The SEM analysis in transmission mode (T-SEM) of NPs on thin film supports has many benefits when compared to the analysis of NPs on bulk substrates. The enhanced material (mass - thickness) contrast of the T-SEM imaging mode is well suited for in-depth and, particularly valuable, to very accurate, traceable, lateral dimensional measurements of NPs. Compared to samples prepared on bulk substrates, T-SEM with energy dispersive X-ray spectroscopy (EDS) achieves a drastically improved spatial resolution of the emitted X-rays. The poor signal-to-noise ratio of the X-ray spectra emitted by a single nanoparticle (NP) can be improved by the use of high-sensitivity (high collection solid angle) silicon drift (SDD), energy-dispersive X-ray spectrometers (EDS). The EDS spectral imaging of a single NP with a spatial resolution below 10 nm has becomeAdvances in scanning electron microscopy (SEM) enable the high-resolution imaging of single nanoparticles (NPs) with sizes well below 10 nm. The SEM analysis in transmission mode (T-SEM) of NPs on thin film supports has many benefits when compared to the analysis of NPs on bulk substrates. The enhanced material (mass - thickness) contrast of the T-SEM imaging mode is well suited for in-depth and, particularly valuable, to very accurate, traceable, lateral dimensional measurements of NPs. Compared to samples prepared on bulk substrates, T-SEM with energy dispersive X-ray spectroscopy (EDS) achieves a drastically improved spatial resolution of the emitted X-rays. The poor signal-to-noise ratio of the X-ray spectra emitted by a single nanoparticle (NP) can be improved by the use of high-sensitivity (high collection solid angle) silicon drift (SDD), energy-dispersive X-ray spectrometers (EDS). The EDS spectral imaging of a single NP with a spatial resolution below 10 nm has become possible. This is demonstrated by means of various examples of nanostructures. Advanced data processing of T-SEM/EDS results sets the stage for the automated classification of NPs by feature analysis. This method combines the detection of morphological structures of interest by image processing of T-SEM micrographs with the chemical classification by EDS.…
Autor*innen: | Vasile-Dan HodoroabaORCiD, Steffi Rades, T. Salge, Johannes Mielke, Erik Ortel, R. Schmidt |
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Dokumenttyp: | Beitrag zu einem Tagungsband |
Veröffentlichungsform: | Verlagsliteratur |
Sprache: | Englisch |
Titel des übergeordneten Werkes (Englisch): | EMAS 2015 - 14th European workshop on modern developments and applications in microbeam analysis |
Jahr der Erstveröffentlichung: | 2015 |
Herausgeber (Institution): | European microbeam analysis society (EMAS) |
Erste Seite: | NUR code:972 - Materials Science, 187-199 |
Freie Schlagwörter: | EDX; High-resolution; Nanoparticles; SEM; T-SEM |
Veranstaltung: | EMAS 2015 - 14th European workshop on modern developments and applications in microbeam analysis |
Veranstaltungsort: | Portoroz, Slovenia |
Beginndatum der Veranstaltung: | 03.05.2015 |
Enddatum der Veranstaltung: | 07.05.2015 |
DOI: | 10.1088/1757-899X/109/1/012006 |
ISBN: | 978-90-8227-691-6 |
Verfügbarkeit des Dokuments: | Datei im Netzwerk der BAM verfügbar ("Closed Access") |
Datum der Freischaltung: | 20.02.2016 |
Referierte Publikation: | Ja |
Datum der Eintragung als referierte Publikation: | 28.05.2015 |