Influence of film thickness on laser ablation of hydrogenated amorphous carbon films
- Single-pulse damage thresholds of hydrogenated amorphous carbon (a-C:H) films were measured for 8-ns laser pulses at 532-nm wavelength. Layer thicknesses from below the optical penetration depth to above the thermal diffusion length (60 nm13 µm) were examined. After correction of the damage-threshold values for the fraction of energy effectively absorbed by the material, the damage threshold was found to increase linearly with the layer thickness, also for film thicknesses below the optical penetration depth of a-C:H. The threshold fluence reached the bulk value for a layer thickness equal to the thermal diffusion length. The thermal diffusion coefficient was obtained from fitting the experimental data. Several phenomena like graphitization, blistering, exfoliation, and ablation were observed for different fluence regimes and film thicknesses.
Autor*innen: | Grazia Daminelli-Widany, Simone Pentzien, Andreas HertwigORCiD, Jörg KrügerORCiD |
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Dokumenttyp: | Zeitschriftenartikel |
Veröffentlichungsform: | Verlagsliteratur |
Sprache: | Englisch |
Titel des übergeordneten Werkes (Englisch): | Applied physics |
Jahr der Erstveröffentlichung: | 2006 |
Verlag: | Springer |
Verlagsort: | Berlin |
Jahrgang/Band: | 83 |
Ausgabe/Heft: | 1 |
Erste Seite: | 89 |
Letzte Seite: | 94 |
DOI: | 10.1007/s00339-005-3460-5 |
ISSN: | 0340-3793 |
Verfügbarkeit des Dokuments: | Physisches Exemplar in der Bibliothek der BAM vorhanden ("Hardcopy Access") |
Bibliotheksstandort: | Sonderstandort: Publica-Schrank |
Datum der Freischaltung: | 19.02.2016 |
Referierte Publikation: | Nein |