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Ellipsometric characterization of metal doped SnOx thin films for SPREE-based gas sensors

  • Gas sensors are an important tool in various areas for example in industrial process control as well as Gas sensors are an important tool in various areas for example in industrial process control as well as safety applications or in research. A useful gas detector should be selective, precise, stable and cost-effective. In the present research a surface based gas detection technique is investigated using the SPR effect with ellipsometric readout. This technique is called surface plasmon resonance enhanced ellipsometry (SPREE). The sensor consists of a gold layer (40 nm) top-coated with a doped metal-oxide (M:SnOₓ, 5 nm). The coating is added by magnetron sputtering with doped targets with different doping concentrations. It could be shown that, without the top-coating, these type of sensors can detect various gases, e.g. CO, H2, O2, O3, He, N2, with sensitivities down to the ppm range (in air). The goal of the present study is to characterize the additional coating materials inGas sensors are an important tool in various areas for example in industrial process control as well as Gas sensors are an important tool in various areas for example in industrial process control as well as safety applications or in research. A useful gas detector should be selective, precise, stable and cost-effective. In the present research a surface based gas detection technique is investigated using the SPR effect with ellipsometric readout. This technique is called surface plasmon resonance enhanced ellipsometry (SPREE). The sensor consists of a gold layer (40 nm) top-coated with a doped metal-oxide (M:SnOₓ, 5 nm). The coating is added by magnetron sputtering with doped targets with different doping concentrations. It could be shown that, without the top-coating, these type of sensors can detect various gases, e.g. CO, H2, O2, O3, He, N2, with sensitivities down to the ppm range (in air). The goal of the present study is to characterize the additional coating materials in dependence of the coating conditions. With the help of the doped-metal oxide, the sensitivity increases dramatically by a factor of 100. Additionally, a selectivity for specific gases is observed which depends on the doping conditions of the coating. Changing the properties of the plasma coating process and the doping metal gives access to a variety of different layers and enables us to find the best conditions.zeige mehrzeige weniger

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Metadaten
Autor*innen:Daniel Fischer
Koautor*innen:Andreas Hertwig, Uwe Beck, M. Kormunda, N. Esser
Dokumenttyp:Vortrag
Veröffentlichungsform:Präsentation
Sprache:Englisch
Jahr der Erstveröffentlichung:2016
DDC-Klassifikation:Naturwissenschaften und Mathematik / Chemie / Analytische Chemie
Freie Schlagwörter:Ellipsometry; Gas sensors; SPR effect; SnOx
Veranstaltung:Leibniz Institut für Analytische Wissenschaften ISAS e.V. - Kolloqium
Veranstaltungsort:Berlin, Germany
Beginndatum der Veranstaltung:05.05.2016
Verfügbarkeit des Dokuments:Datei im Netzwerk der BAM verfügbar ("Closed Access")
Datum der Freischaltung:02.08.2016
Referierte Publikation:Nein
Eingeladener Vortrag:Nein
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