LTCC substrates for high performance strain gauges
- Recent advances in the development of high gauge factor thin-films for strain gauges prompt the research on advanced substrate materials. A glass ceramic composite has been developed in consideration of a high coefficient of thermal expansion and a low modulus of elasticity for the application as support material for thin-film sensors. Constantan foil strain gauges were fabricated from this material by tape casting, pressure-assisted sintering and subsequent lamination of the metal foil on the planar ceramic substrates. The sensors were mounted on a strain gauge beam arrangement and load curves and creep behavior were evaluated. The accuracy of the assembled load cells correspond to accuracy class C6. That qualifies the load cells for the use in automatic packaging units and confirms the applicability of the LTCC substrates for fabrication of accurate strain gauges. To facilitate the deposition of thin film sensor structures onto the LTCC substrates, the pressure-assisted sinteringRecent advances in the development of high gauge factor thin-films for strain gauges prompt the research on advanced substrate materials. A glass ceramic composite has been developed in consideration of a high coefficient of thermal expansion and a low modulus of elasticity for the application as support material for thin-film sensors. Constantan foil strain gauges were fabricated from this material by tape casting, pressure-assisted sintering and subsequent lamination of the metal foil on the planar ceramic substrates. The sensors were mounted on a strain gauge beam arrangement and load curves and creep behavior were evaluated. The accuracy of the assembled load cells correspond to accuracy class C6. That qualifies the load cells for the use in automatic packaging units and confirms the applicability of the LTCC substrates for fabrication of accurate strain gauges. To facilitate the deposition of thin film sensor structures onto the LTCC substrates, the pressure-assisted sintering technology has been refined. By the use of smooth setters instead of release tapes substrates with minimal surface roughness were fabricated. Metallic thin films deposited on these substrates exhibit low surface resistances comparable to thin films on commercial alumina thin-film substrates. The presented advances in material design and manufacturing technology are important to promote the development of high performance thin-film strain gauges.…
Autor*innen: | Björn MiellerORCiD, Marion Gemeinert, R. Koppert, J. Bolte, Torsten Rabe |
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Dokumenttyp: | Beitrag zu einem Tagungsband |
Veröffentlichungsform: | Graue Literatur |
Sprache: | Englisch |
Titel des übergeordneten Werkes (Englisch): | CICMT 2012 - 8th International conference on ceramic interconnect & ceramic microsystems technologies (Proceedings) |
Jahr der Erstveröffentlichung: | 2012 |
Erste Seite: | 000175 |
Letzte Seite: | 000180 (Session TP 4 / TP 43) |
Freie Schlagwörter: | LTCC; Pressure-assisted sintering; Strain gauge; Thin-film substrate |
Veranstaltung: | CICMT 2012 - 8th International conference on ceramic interconnect & ceramic microsystems technologies |
Veranstaltungsort: | Erfurt, Germany |
Beginndatum der Veranstaltung: | 16.04.2012 |
Enddatum der Veranstaltung: | 19.04.2012 |
Bemerkung: | Geburtsname von Mieller, Björn: Brandt, B. - Birth name of Mieller, Björn: Brandt, B. |
Verfügbarkeit des Dokuments: | Datei im Netzwerk der BAM verfügbar ("Closed Access") |
Datum der Freischaltung: | 20.02.2016 |
Referierte Publikation: | Nein |