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Final report on key comparison K67 and parallel pilot study P108: measurement of composition of a thin Fe-Ni alloy film

  • The Key Comparison K67 and the parallel Pilot Study P108 on quantitative analysis of thin alloy films have been completed in the Surface Analysis Working Group (SAWG) of the Consultative Committee for Amount of Substance (CCQM). The aim of these inter-laboratory comparisons is to determine the degree of equivalence in the measurement capability of national metrology institutes (NMIs) and designated institutes (DIs) for the determination of the composition of thin alloy films. The measurand is expressed in atomic percent. A Fe-Ni alloy film with a certified composition was available for the participants of the inter-laboratory comparison. It has been used as a reference specimen to determine the relative sensitivity factors (RSF) of Fe and Ni for the different analytical methods used by the participants to determine the composition of the test sample. As was shown in the preceding Pilot Study P98, the degrees of equivalence in the measurement capabilities of the participants can beThe Key Comparison K67 and the parallel Pilot Study P108 on quantitative analysis of thin alloy films have been completed in the Surface Analysis Working Group (SAWG) of the Consultative Committee for Amount of Substance (CCQM). The aim of these inter-laboratory comparisons is to determine the degree of equivalence in the measurement capability of national metrology institutes (NMIs) and designated institutes (DIs) for the determination of the composition of thin alloy films. The measurand is expressed in atomic percent. A Fe-Ni alloy film with a certified composition was available for the participants of the inter-laboratory comparison. It has been used as a reference specimen to determine the relative sensitivity factors (RSF) of Fe and Ni for the different analytical methods used by the participants to determine the composition of the test sample. As was shown in the preceding Pilot Study P98, the degrees of equivalence in the measurement capabilities of the participants can be improved in that way. The composition of the reference specimen was certified by inductively coupled plasma mass spectrometry (ICP-MS) using the isotope dilution method. The in-depth and lateral homogeneity, determined in terms of elemental composition, of the certified reference sample and the unknown test sample were confirmed by secondary ion mass spectrometry (SIMS) using C60 primary ions by the leading laboratory. Five laboratories participated in the key comparison. Four of them used x-ray photoelectron spectroscopy (XPS) and one Auger electron spectroscopy (AES). One laboratory participated in the parallel P108 pilot study using electron probe micro analysis with an energy-dispersive spectrometer (ED EPMA) and XPS.zeige mehrzeige weniger

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Metadaten
Autoren/innen:K.J. Kim, J.W. Kim, D.W. Moon, Thomas Wirth, Vasile-Dan Hodoroaba, Thomas Gross, Wolfgang Unger, W. Jordaan, M.v. Staden, S. Prins, H. Wang, X. Song, L. Zhang, T. Fujimoto, I. Kojima
Dokumenttyp:Zeitschriftenartikel
Veröffentlichungsform:Verlagsliteratur
Sprache:Englisch
Titel des übergeordneten Werkes (Englisch):Metrologia
Jahr der Erstveröffentlichung:2010
Verlag:Inst. of Physics Publ.
Verlagsort:Bristol
Jahrgang/Band:47
Ausgabe/Heft:1A
Erste Seite:08011-1 - 08011-15
Freie Schlagwörter:AES; CCQM; EDX; Fe-Ni alloy film; Key comparison; XPS
DOI:https://doi.org/10.1088/0026-1394/47/1A/08011
ISSN:0026-1394
ISSN:1681-7575
Verfügbarkeit des Volltexts:Papiergebundenes Belegexemplar in der Bibliothek der BAM vorhanden ("Hard-copy Access")
Bibliotheksstandort:Sonderstandort: Publica-Schrank
Datum der Freischaltung:19.02.2016
Referierte Publikation:Ja
Datum der Eintragung als referierte Publikation:25.03.2010