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Domain formation in nano-patterned PZT thin films

  • In this work, reactive magnetron-sputtered Pb(Zr,Ti)O3 thin films were used to fabricate well-ordered nanodot arrays by means of nanosphere lithography (NSL). NSL is based on a two-step etch process by means of, firstly adjusting the diameter of polystyrene spheres in the self-assembled polymeric nanosphere mask using reactive ion etching, and secondly transferring the mask to the substrate by ion milling with adjusted heights. Hence, structures with different aspect ratios can be fabricated. Piezoresponse force microscopy was used as the inspection tool on both non-patterned and patterned films. Both the topography and polarization out of plane and in plane was deduced in this mode. Grains of nanodots with low aspect ratio form domain structures comparable to domains in non-patterned films. In contrast to that, nanodots with a higher aspect ratio form particular structures. The in-plane amplitude images show mostly a bisectioned domain assembly, while the out-of-plane amplitudeIn this work, reactive magnetron-sputtered Pb(Zr,Ti)O3 thin films were used to fabricate well-ordered nanodot arrays by means of nanosphere lithography (NSL). NSL is based on a two-step etch process by means of, firstly adjusting the diameter of polystyrene spheres in the self-assembled polymeric nanosphere mask using reactive ion etching, and secondly transferring the mask to the substrate by ion milling with adjusted heights. Hence, structures with different aspect ratios can be fabricated. Piezoresponse force microscopy was used as the inspection tool on both non-patterned and patterned films. Both the topography and polarization out of plane and in plane was deduced in this mode. Grains of nanodots with low aspect ratio form domain structures comparable to domains in non-patterned films. In contrast to that, nanodots with a higher aspect ratio form particular structures. The in-plane amplitude images show mostly a bisectioned domain assembly, while the out-of-plane amplitude images show in some cases more complex structures like 'c'-shaped domains or multi-domains around a center domain. The patterning of the ferroelectric material was shown to affect the formation of ferroelectric domains. The initial polycrystalline, randomly-ordered films are re-oriented and show domain structures depending on nanodisc diameter and aspect ratio. This may enable tailoring of ferroelectric materials in their piezoelectric and pyroelectric properties by patterning.zeige mehrzeige weniger

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Autor*innen:M. Waegner, M. Schröder, G. Suchaneck, Heinz SturmORCiD, Christiane Weimann, L.M. Eng, G. Gerlach
Dokumenttyp:Zeitschriftenartikel
Veröffentlichungsform:Verlagsliteratur
Sprache:Englisch
Titel des übergeordneten Werkes (Englisch):MRS Proceedings
Jahr der Erstveröffentlichung:2012
Verlag:Mater. Res. Soc
Verlagsort:Warrendale, Pa.
Jahrgang/Band:1454
Erste Seite:1
Letzte Seite:6(?)
Freie Schlagwörter:Ferroelectric; Nanodots; Nanostructure; Piezo response force microscopy; Piezoresponse
Veranstaltung:MRS Spring meeting 2012
Veranstaltungsort:San Francisco, CA, USA
Beginndatum der Veranstaltung:2012-04-09
Enddatum der Veranstaltung:2012-04-13
DOI:10.1557/opl.2012.1230
ISSN:1946-4274
ISSN:0272-9172
Verfügbarkeit des Dokuments:Datei im Netzwerk der BAM verfügbar ("Closed Access")
Bibliotheksstandort:Sonderstandort: Publica-Schrank
Datum der Freischaltung:19.02.2016
Referierte Publikation:Nein
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