Ti/TiN multilayer coatings: deposition technique, characterization and mechanical properties
- Ti/TiN multilayer coatings with multilayer periods in the range 550 nm and a final thickness of 2 µm were deposited on steel substrates by cyclic modulation of nitrogen gas flow into the chamber of a PVD sputtering device. Coating characterization was performed by cross-sectional transmission electron microscopy, glancing-angle X-ray diffraction and instrumental indentation testing. Individual a-titanium and titanium nitride layers were always observed, although for the finer microstructures, the TiN layers were thicker than the Ti layers by a factor three. The plastic hardness of the films increased steadily with decreasing layer spacing, following a HallPetch relationship. Finally, a hardness value of 42 GPa was reached, which is similar to that of a thick TiN monolayer, prepared under the same coating conditions.
Autor*innen: | Alexander Dück, Nadja Gamer, Wolfgang Gesatzke, Michael Griepentrog, Werner ÖsterleORCiD, Mario Sahre, Ingrid Urban |
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Dokumenttyp: | Zeitschriftenartikel |
Veröffentlichungsform: | Verlagsliteratur |
Sprache: | Englisch |
Titel des übergeordneten Werkes (Englisch): | Surface and coatings technology |
Jahr der Erstveröffentlichung: | 2001 |
Verlag: | Elsevier Science |
Verlagsort: | Lausanne |
Jahrgang/Band: | 142-144 |
Erste Seite: | 579 |
Letzte Seite: | 584 |
Freie Schlagwörter: | Cross-sectional transmission electron microscopy (XTEM); Magnetron sputtering; Mechanical properties; Multilayer; Ti/TiN |
DOI: | 10.1016/S0257-8972(01)01171-9 |
ISSN: | 0257-8972 |
Verfügbarkeit des Dokuments: | Physisches Exemplar in der Bibliothek der BAM vorhanden ("Hardcopy Access") |
Bibliotheksstandort: | Sonderstandort: Publica-Schrank |
Bibliotheksstandort: | ZS 45 |
Datum der Freischaltung: | 19.02.2016 |
Referierte Publikation: | Ja |
Datum der Eintragung als referierte Publikation: | 04.07.2005 |