Optimization of cleaning and aminosilanization protocols for Si wafers to be used as platforms for biochip microarrays by surface analysis (XPS, ToF-SIMS and NEXAFS spectroscopy)
- It is known that aminosilanized Si wafers may be used as microarray platforms. Results of an XPS study of a cleaning applied to Si wafers prior to aminosilanization are presented and discussed. Furthermore, the results of an aminosilanization protocol optimized in terms of nitrogen chemistry are described. After optimization of the protocol a free amine content of 94% was reached. The surface chemistry was investigated in this study by using XPS, time of flight (ToF)-SIMS and near-edge X-ray absorption fine structure (NEXAFS) spectroscopy. Reference to aminosilanization protocols reported in the literature has been made.
Autor*innen: | Nora Graf, E. Yegen, Andreas Lippitz, Dieter Treu, Thomas Wirth, Wolfgang UngerORCiD |
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Dokumenttyp: | Zeitschriftenartikel |
Veröffentlichungsform: | Verlagsliteratur |
Sprache: | Englisch |
Titel des übergeordneten Werkes (Englisch): | Surface and interface analysis |
Jahr der Erstveröffentlichung: | 2008 |
Verlag: | Wiley |
Verlagsort: | Chichester |
Jahrgang/Band: | 40 |
Ausgabe/Heft: | 3-4 |
Erste Seite: | 180 |
Letzte Seite: | 183 |
Freie Schlagwörter: | Aminosilanization; Microarray; NEXAFS; Si wafers; ToF-SIMS; XPS |
DOI: | 10.1002/sia.2621 |
ISSN: | 0142-2421 |
ISSN: | 1096-9918 |
Verfügbarkeit des Dokuments: | Physisches Exemplar in der Bibliothek der BAM vorhanden ("Hardcopy Access") |
Bibliotheksstandort: | Sonderstandort: Publica-Schrank |
Datum der Freischaltung: | 19.02.2016 |
Referierte Publikation: | Ja |
Datum der Eintragung als referierte Publikation: | 01.04.2008 |