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Analytical and numerical analysis of imaging mechanism of dynamic scanning electron microscopy

  • The direct observation of small oscillating structures with the help of a scanning electron beam is a new approach to study the vibrational dynamics of cantilevers and microelectromechanical systems. In the scanning electron microscope, the conventional signal of secondary electrons (SE, dc part) is separated from the signal response of the SE detector, which is correlated to the respective excitation frequency for vibration by means of a lock-in amplifier. The dynamic response is separated either into images of amplitude and phase shift or into real and imaginary parts. Spatial resolution is limited to the diameter of the electron beam. The sensitivity limit to vibrational motion is estimated to be sub-nanometer for high integration times. Due to complex imaging mechanisms, a theoretical model was developed for the interpretation of the obtained measurements, relating cantilever shapes to interaction processes consisting of incident electron beam, electron–lever interaction, emittedThe direct observation of small oscillating structures with the help of a scanning electron beam is a new approach to study the vibrational dynamics of cantilevers and microelectromechanical systems. In the scanning electron microscope, the conventional signal of secondary electrons (SE, dc part) is separated from the signal response of the SE detector, which is correlated to the respective excitation frequency for vibration by means of a lock-in amplifier. The dynamic response is separated either into images of amplitude and phase shift or into real and imaginary parts. Spatial resolution is limited to the diameter of the electron beam. The sensitivity limit to vibrational motion is estimated to be sub-nanometer for high integration times. Due to complex imaging mechanisms, a theoretical model was developed for the interpretation of the obtained measurements, relating cantilever shapes to interaction processes consisting of incident electron beam, electron–lever interaction, emitted electrons and detector response. Conclusions drawn from this new model are compared with numerical results based on the Euler–Bernoulli equation.zeige mehrzeige weniger

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Metadaten
Autor*innen:Maria-Astrid Schröter, M. Holschneider, Heinz SturmORCiD
Dokumenttyp:Zeitschriftenartikel
Veröffentlichungsform:Verlagsliteratur
Sprache:Englisch
Titel des übergeordneten Werkes (Englisch):Nanotechnology
Jahr der Erstveröffentlichung:2012
Verlag:IOP Publishing Ltd.
Verlagsort:Bristol
Jahrgang/Band:23
Ausgabe/Heft:43
Erste Seite:435501-1 - 435501-10
Freie Schlagwörter:Cantilever motion; Electron microscopy; Harmonics; Imaging theory; Mathematical model; Modes; Scanning force microscopy
DOI:10.1088/0957-4484/23/43/435501
ISSN:0957-4484
ISSN:1361-6528
Verfügbarkeit des Dokuments:Datei im Netzwerk der BAM verfügbar ("Closed Access")
Bibliotheksstandort:Sonderstandort: Publica-Schrank
Datum der Freischaltung:20.02.2016
Referierte Publikation:Ja
Datum der Eintragung als referierte Publikation:04.02.2013
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