M. Alvisi, M. Blome, Michael Griepentrog, Vasile-Dan Hodoroaba, P. Karduck, M. Mostert, M. Nacucchi, Mathias Procop, M. Rohde, F. Scholze, P. Statham, R. Terborg, J.-F. Thiot
- A calibration procedure for the detection efficiency of energy dispersive X-ray spectrometers (EDS) used in combination with scanning electron microscopy (SEM) for standardless electron probe microanalysis (EPMA) is presented. The procedure is based on the comparison of X-ray spectra from a reference material (RM) measured with the EDS to be calibrated and a reference EDS. The RM is certified by the line intensities in the X-ray spectrum recorded with a reference EDS and by its composition. The calibration of the reference EDS is performed using synchrotron radiation at the radiometry laboratory of the Physikalisch-Technische Bundesanstalt. Measurement of RM spectra and comparison of the specified line intensities enables a rapid efficiency calibration on most SEMs. The article reports on studies to prepare such a RM and on EDS calibration and proposes a methodology that could be implemented in current spectrometer software to enable the calibration with a minimum of operatorA calibration procedure for the detection efficiency of energy dispersive X-ray spectrometers (EDS) used in combination with scanning electron microscopy (SEM) for standardless electron probe microanalysis (EPMA) is presented. The procedure is based on the comparison of X-ray spectra from a reference material (RM) measured with the EDS to be calibrated and a reference EDS. The RM is certified by the line intensities in the X-ray spectrum recorded with a reference EDS and by its composition. The calibration of the reference EDS is performed using synchrotron radiation at the radiometry laboratory of the Physikalisch-Technische Bundesanstalt. Measurement of RM spectra and comparison of the specified line intensities enables a rapid efficiency calibration on most SEMs. The article reports on studies to prepare such a RM and on EDS calibration and proposes a methodology that could be implemented in current spectrometer software to enable the calibration with a minimum of operator assistance.…
MetadatenAutor*innen: | M. Alvisi, M. Blome, Michael Griepentrog, Vasile-Dan HodoroabaORCiD, P. Karduck, M. Mostert, M. Nacucchi, Mathias ProcopORCiD, M. Rohde, F. Scholze, P. Statham, R. Terborg, J.-F. Thiot |
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Dokumenttyp: | Zeitschriftenartikel |
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Veröffentlichungsform: | Verlagsliteratur |
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Sprache: | Englisch |
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Titel des übergeordneten Werkes (Englisch): | Microscopy and microanalysis |
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Jahr der Erstveröffentlichung: | 2006 |
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Herausgeber (Institution): | Microscopy Society of America |
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Verlag: | Cambridge University Press |
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Verlagsort: | New York, NY |
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Jahrgang/Band: | 12 |
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Ausgabe/Heft: | 5 |
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Erste Seite: | 406 |
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Letzte Seite: | 415 |
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Freie Schlagwörter: | Detection efficiency; Energy dispersive X-ray spectrometry; Spectrometer calibration; Standardless analysis; X-ray detectors |
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DOI: | 10.1017/S1431927606060557 |
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ISSN: | 1431-9276 |
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ISSN: | 1435-8115 |
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Verfügbarkeit des Dokuments: | Physisches Exemplar in der Bibliothek der BAM vorhanden ("Hardcopy Access") |
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Bibliotheksstandort: | Sonderstandort: Publica-Schrank |
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Datum der Freischaltung: | 19.02.2016 |
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Referierte Publikation: | Ja |
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Datum der Eintragung als referierte Publikation: | 25.09.2006 |
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