J. Vila-Comamala, A. Diaz, M. Guizar-Sicairos, S. Gorelick, V.A. Guzenko, P. Karvinen, C.M. Kewish, E. Färm, M. Ritala, Alexandre Mantion, O. Bunk, A. Menzel, C. David
- Recent advances in the fabrication of diffractive X-ray optics have boosted hard X-ray microscopy into spatial resolutions of 30 nm and below. Here, we demonstrate the fabrication of zone-doubled Fresnel zone plates for multi-keV photon energies (4-12 keV) with outermost zone widths down to 20 nm. However, the characterization of such elements is not straightforward using conventional methods such as knife edge scans on well-characterized test objects. To overcome this limitation, we have used ptychographic coherent diffractive imaging to characterize a 20 nm-wide X-ray focus produced by a zone-doubled Fresnel zone plate at a photon energy of 6.2 keV. An ordinary scanning transmission X-ray microscope was modified to acquire the ptychographic data from a strongly scattering test object. The ptychographic algorithms allowed for the reconstruction of the image of the test object as well as for the reconstruction of the focused hard X-ray beam waist, with high spatial resolution andRecent advances in the fabrication of diffractive X-ray optics have boosted hard X-ray microscopy into spatial resolutions of 30 nm and below. Here, we demonstrate the fabrication of zone-doubled Fresnel zone plates for multi-keV photon energies (4-12 keV) with outermost zone widths down to 20 nm. However, the characterization of such elements is not straightforward using conventional methods such as knife edge scans on well-characterized test objects. To overcome this limitation, we have used ptychographic coherent diffractive imaging to characterize a 20 nm-wide X-ray focus produced by a zone-doubled Fresnel zone plate at a photon energy of 6.2 keV. An ordinary scanning transmission X-ray microscope was modified to acquire the ptychographic data from a strongly scattering test object. The ptychographic algorithms allowed for the reconstruction of the image of the test object as well as for the reconstruction of the focused hard X-ray beam waist, with high spatial resolution and dynamic range. This method yields a full description of the focusing performance of the Fresnel zone plate and we demonstrate the usefulness ptychographic coherent diffractive imaging for metrology and alignment of nanofocusing diffractive X-ray lenses.…
MetadatenAutor*innen: | J. Vila-Comamala, A. Diaz, M. Guizar-Sicairos, S. Gorelick, V.A. Guzenko, P. Karvinen, C.M. Kewish, E. Färm, M. Ritala, Alexandre Mantion, O. Bunk, A. Menzel, C. David |
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Persönliche Herausgeber*innen: | C. Morawe, A.M. Khounsary, S. Goto |
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Dokumenttyp: | Beitrag zu einem Tagungsband |
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Veröffentlichungsform: | Verlagsliteratur |
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Sprache: | Englisch |
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Titel des übergeordneten Werkes (Englisch): | Advances in X-Ray/EUV optics and components VI (Proceedings of SPIE) |
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Jahr der Erstveröffentlichung: | 2011 |
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Herausgeber (Institution): | International society for optics and photonics (SPIE) |
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Jahrgang/Band: | 8139 |
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Erste Seite: | 81390E-1 |
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Letzte Seite: | 81390E-7 |
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Freie Schlagwörter: | Diffractive X-ray optics; Electron beam lithography; Ptychographic coherent diffractive imaging; X-ray imaging |
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Veranstaltung: | SPIE Optics and photonics |
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Veranstaltungsort: | San Diego, USA |
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Beginndatum der Veranstaltung: | 20.08.2011 |
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Enddatum der Veranstaltung: | 25.08.2011 |
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DOI: | 10.1117/12.893235 |
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ISSN: | 0277-786X |
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Bemerkung: | Serientitel: Proceedings of SPIE – Series title: Proceedings of SPIE |
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Verfügbarkeit des Dokuments: | Datei im Netzwerk der BAM verfügbar ("Closed Access") |
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Datum der Freischaltung: | 19.02.2016 |
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Referierte Publikation: | Nein |
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