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Characterization of a 20-nm hard X-ray focus by ptychographic coherent diffractive imaging

  • Recent advances in the fabrication of diffractive X-ray optics have boosted hard X-ray microscopy into spatial resolutions of 30 nm and below. Here, we demonstrate the fabrication of zone-doubled Fresnel zone plates for multi-keV photon energies (4-12 keV) with outermost zone widths down to 20 nm. However, the characterization of such elements is not straightforward using conventional methods such as knife edge scans on well-characterized test objects. To overcome this limitation, we have used ptychographic coherent diffractive imaging to characterize a 20 nm-wide X-ray focus produced by a zone-doubled Fresnel zone plate at a photon energy of 6.2 keV. An ordinary scanning transmission X-ray microscope was modified to acquire the ptychographic data from a strongly scattering test object. The ptychographic algorithms allowed for the reconstruction of the image of the test object as well as for the reconstruction of the focused hard X-ray beam waist, with high spatial resolution andRecent advances in the fabrication of diffractive X-ray optics have boosted hard X-ray microscopy into spatial resolutions of 30 nm and below. Here, we demonstrate the fabrication of zone-doubled Fresnel zone plates for multi-keV photon energies (4-12 keV) with outermost zone widths down to 20 nm. However, the characterization of such elements is not straightforward using conventional methods such as knife edge scans on well-characterized test objects. To overcome this limitation, we have used ptychographic coherent diffractive imaging to characterize a 20 nm-wide X-ray focus produced by a zone-doubled Fresnel zone plate at a photon energy of 6.2 keV. An ordinary scanning transmission X-ray microscope was modified to acquire the ptychographic data from a strongly scattering test object. The ptychographic algorithms allowed for the reconstruction of the image of the test object as well as for the reconstruction of the focused hard X-ray beam waist, with high spatial resolution and dynamic range. This method yields a full description of the focusing performance of the Fresnel zone plate and we demonstrate the usefulness ptychographic coherent diffractive imaging for metrology and alignment of nanofocusing diffractive X-ray lenses.zeige mehrzeige weniger

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Metadaten
Autor*innen:J. Vila-Comamala, A. Diaz, M. Guizar-Sicairos, S. Gorelick, V.A. Guzenko, P. Karvinen, C.M. Kewish, E. Färm, M. Ritala, Alexandre Mantion, O. Bunk, A. Menzel, C. David
Persönliche Herausgeber*innen:C. Morawe, A.M. Khounsary, S. Goto
Dokumenttyp:Beitrag zu einem Tagungsband
Veröffentlichungsform:Verlagsliteratur
Sprache:Englisch
Titel des übergeordneten Werkes (Englisch):Advances in X-Ray/EUV optics and components VI (Proceedings of SPIE)
Jahr der Erstveröffentlichung:2011
Herausgeber (Institution):International society for optics and photonics (SPIE)
Jahrgang/Band:8139
Erste Seite:81390E-1
Letzte Seite:81390E-7
Freie Schlagwörter:Diffractive X-ray optics; Electron beam lithography; Ptychographic coherent diffractive imaging; X-ray imaging
Veranstaltung:SPIE Optics and photonics
Veranstaltungsort:San Diego, USA
Beginndatum der Veranstaltung:20.08.2011
Enddatum der Veranstaltung:25.08.2011
DOI:10.1117/12.893235
ISSN:0277-786X
Bemerkung:
Serientitel: Proceedings of SPIE – Series title: Proceedings of SPIE
Verfügbarkeit des Dokuments:Datei im Netzwerk der BAM verfügbar ("Closed Access")
Datum der Freischaltung:19.02.2016
Referierte Publikation:Nein
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