Low fired high-K dielectrics buried into LTCC substrates
- Due to addition of minor amounts of suitable additive combinations to BaTiO3 powder the sintering temperature was reduced to 900 °C. Excellent densification (more than 98% of theoretical density) and good dielectric properties were achieved after sintering at 900 °C for 2 hours. Dielectric properties can be improved by modifying the composition of sintering additives and additon of further dopants. The low sintering temperature of newly developed capacitor material allows a co-sintering with pure silver electrodes. No interfacial reaction between silver electrodes and ceramics was observed by microprobe analysis. The dielectric constants of about 1200 to 3000 and the dielectric losses of about 0.008 to 0.02 were measured (f = 1 kHz, T = 25 °C). The temperature dependency of dielectric constant for new capacitor materials is low, almost X7R characteristics. Furthermore, the densification and the dielectric properties of embedded capacitors in LTCC were investigated.
Autor*innen: | Hamid Naghib Zadeh, Carsten Glitzky, Torsten Rabe |
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Dokumenttyp: | Beitrag zu einem Sammelband |
Veröffentlichungsform: | Verlagsliteratur |
Sprache: | Englisch |
Titel des übergeordneten Werkes (Englisch): | 5th Ceramic Interconnect and Ceramic Microsystems Technologies Conference |
Jahr der Erstveröffentlichung: | 2009 |
Ausgabe/Heft: | WA 32 |
Erste Seite: | 000188 |
Letzte Seite: | 000192 |
Freie Schlagwörter: | Barium titanate; Capacitor; LTCC |
Veranstaltung: | 5th Ceramic Interconnect and Ceramic Microsystems Technologies Conference |
Veranstaltungsort: | Denver, USA |
Beginndatum der Veranstaltung: | 2009-04-20 |
Enddatum der Veranstaltung: | 2009-04-23 |
ISBN: | 0-930815-87-4 |
Verfügbarkeit des Dokuments: | Physisches Exemplar in der Bibliothek der BAM vorhanden ("Hardcopy Access") |
Bibliotheksstandort: | Sonderstandort: Publica-Schrank |
Datum der Freischaltung: | 19.02.2016 |
Referierte Publikation: | Nein |