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Performance of high-resolution SEM/EDX systems equipped with transmission mode (TSEM) for imaging and measurement of size and size distribution of spherical nanoparticles

  • The analytical performance of high-resolution scanning electron microscopy/energy dispersive X-ray spectroscopy (SEM/EDX) for accurate determination of the size, size distribution, qualitative elemental analysis of nanoparticles (NPs) was systematically investigated. It is demonstrated how powerful high-resolution SEM is by using both mono- and bi-modal distributions of SiO2 airborne NPs collected on appropriate substrates after their generation from colloidal suspension. The transmission mode of the SEM (TSEM) is systematically employed for NPs prepared on thin film substrates such as transmission electron microscopy grids. Measurements in the transmission mode were performed by using a 'single-unit' TSEM transmission setup as manufactured and patented by Zeiss. This alternative to the 'conventional' STEM detector consists of a special sample holder that is used in conjunction with the in-place Everhart–Thornley detector. In addition, the EDX capabilities for imaging NPs, highlightingThe analytical performance of high-resolution scanning electron microscopy/energy dispersive X-ray spectroscopy (SEM/EDX) for accurate determination of the size, size distribution, qualitative elemental analysis of nanoparticles (NPs) was systematically investigated. It is demonstrated how powerful high-resolution SEM is by using both mono- and bi-modal distributions of SiO2 airborne NPs collected on appropriate substrates after their generation from colloidal suspension. The transmission mode of the SEM (TSEM) is systematically employed for NPs prepared on thin film substrates such as transmission electron microscopy grids. Measurements in the transmission mode were performed by using a 'single-unit' TSEM transmission setup as manufactured and patented by Zeiss. This alternative to the 'conventional' STEM detector consists of a special sample holder that is used in conjunction with the in-place Everhart–Thornley detector. In addition, the EDX capabilities for imaging NPs, highlighting the promising potential with respect to exploitation of the sensitivity of the new large area silicon drift detector energy dispersive X-ray spectrometers were also investigated. The work was carried out in the frame of a large prenormative VAMAS (Versailles Project on Advanced Materials and Standards) project, dedicated to finding appropriate methods and procedures for traceable characterization of NP size and size distribution.zeige mehrzeige weniger

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Metadaten
Autor*innen:Vasile-Dan HodoroabaORCiD, C. Motzkus, T. Macé, S. Vaslin-Reimann
Dokumenttyp:Zeitschriftenartikel
Veröffentlichungsform:Verlagsliteratur
Sprache:Englisch
Titel des übergeordneten Werkes (Englisch):Microscopy and microanalysis
Jahr der Erstveröffentlichung:2014
Herausgeber (Institution):Microscopy Society of America
Verlag:Cambridge University Press
Verlagsort:New York, NY
Jahrgang/Band:20
Ausgabe/Heft:2
Erste Seite:602
Letzte Seite:612
Freie Schlagwörter:EDX; High-resolution scanning electron microscope (SEM); Large area SDD; Nanoparticles; SiO2; Size; Size distribution; Transmission; Transmission scanning electron microscopy/microscope (TSEM, T-SEM, STEM)
DOI:10.1017/S1431927614000014
ISSN:1431-9276
ISSN:1435-8115
Verfügbarkeit des Dokuments:Datei im Netzwerk der BAM verfügbar ("Closed Access")
Datum der Freischaltung:20.02.2016
Referierte Publikation:Ja
Datum der Eintragung als referierte Publikation:28.04.2014
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