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Femtosecond laser-induced oxidation in the formation of periodic surface structures

  • Micro- and nanostructuring with laser-induced periodic surface structures (LIPSS) has been demonstrated to be feasible in a wide variety of materials including metals, semiconductors and dielectrics. Suitable processing regimes for flat, curved and complex surfaces have been identified for many materials, allowing the generation of diverse applications in fields such as optics, tribology and medicine, to name a few. A common side effect when producing such structures in air environment is the formation of a thin surface oxide layer in the laser irradiated areas. Previous studies have shown that oxidation plays an important role in the tribological performance for which the structures where created, and very recently it has been shown that the laser-induced oxide graded layers may contribute to the formation of a new type of embedded low-spatial frequency LIPSS (LSFL) with annomalous orientation parallel to the laser polarization, in addition to the appearance of the well-knownMicro- and nanostructuring with laser-induced periodic surface structures (LIPSS) has been demonstrated to be feasible in a wide variety of materials including metals, semiconductors and dielectrics. Suitable processing regimes for flat, curved and complex surfaces have been identified for many materials, allowing the generation of diverse applications in fields such as optics, tribology and medicine, to name a few. A common side effect when producing such structures in air environment is the formation of a thin surface oxide layer in the laser irradiated areas. Previous studies have shown that oxidation plays an important role in the tribological performance for which the structures where created, and very recently it has been shown that the laser-induced oxide graded layers may contribute to the formation of a new type of embedded low-spatial frequency LIPSS (LSFL) with annomalous orientation parallel to the laser polarization, in addition to the appearance of the well-known high-spatial frequency LIPSS (HSFL) at the surface. In this contribution, we explore this effect experimentally for chromium nitride (CrN) irradiated with femtosecond laser pulses and compare the findings to finite-difference time-domain (FDTD) simulations of the intensity distributions at different depth positions.zeige mehrzeige weniger

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Metadaten
Autor*innen:Camilo Florian, J.-L. Deziel, Sabrina V. Kirner, J. Siegel, Jörn BonseORCiD
Dokumenttyp:Beitrag zu einem Tagungsband
Veröffentlichungsform:Graue Literatur
Sprache:Englisch
Titel des übergeordneten Werkes (Englisch):Proceedings of 2021 Conference on Lasers and Electro-Optics/Europe – European Quantum Electronics Conferences
Jahr der Erstveröffentlichung:2021
Organisationseinheit der BAM:6 Materialchemie
6 Materialchemie / 6.2 Material- und Oberflächentechnologien
Verlag:Institute of Electrical and Electronics Engineers (IEEE)
Verlagsort:Piscataway, NJ, USA
Jahrgang/Band:2021
Aufsatznummer:cm-1-2
Erste Seite:1
DDC-Klassifikation:Technik, Medizin, angewandte Wissenschaften / Ingenieurwissenschaften / Ingenieurwissenschaften und zugeordnete Tätigkeiten
Technik, Medizin, angewandte Wissenschaften / Ingenieurwissenschaften / Angewandte Physik
Freie Schlagwörter:Femtosecond laser ablation; Finite-difference time-domain calculations; Laser-induced periodic surface structures (LIPSS); Surface oxidation
Themenfelder/Aktivitätsfelder der BAM:Energie
Material
Material / Nano
Veranstaltung:2021 Conference on Lasers and Electro-Optics/Europe – European Quantum Electronics Virtual Conferences
Veranstaltungsort:Munich, Germany
Beginndatum der Veranstaltung:21.06.2021
Enddatum der Veranstaltung:25.06.2021
DOI:10.1109/CLEO/Europe-EQEC52157.2021.9542774
ISBN:978-1-6654-1876-8
Verfügbarkeit des Dokuments:Datei im Netzwerk der BAM verfügbar ("Closed Access")
Datum der Freischaltung:06.10.2021
Referierte Publikation:Ja
Datum der Eintragung als referierte Publikation:02.03.2022
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