A microfocus X-ray source for improved EDS and XRF analysis in the SEM
- A microfocus X-ray source mounted on the analysis chamber of an SEM was used to excite X-ray fluorescence spectra and to detect chemical elements with concentrations below the detection limit of the electron-excited X-ray spectra conventionally measured with SEM/EDS. An aluminium alloy and a hard material ceramics were analysed as representative examples. It is demonstrated that the combination of the three analytical methods: (1) SEM imaging for surface morphology characterisation; (2) electron-excited X-ray spectroscopy with its high spatial resolution for element analysis of inclusions or precipitates; and (3) X-ray fluorescence for the detection of elements with concentrations below 0.1 mass% considerably improves the performance of SEM/EDX analyses.
Autor*innen: | Mathias ProcopORCiD, Vasile-Dan HodoroabaORCiD, Vanessa Rackwitz |
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Dokumenttyp: | Zeitschriftenartikel |
Veröffentlichungsform: | Verlagsliteratur |
Sprache: | Englisch |
Titel des übergeordneten Werkes (Englisch): | Microscopy and analysis / European edition |
Jahr der Erstveröffentlichung: | 2011 |
Verlag: | Wiley |
Verlagsort: | Chichester |
Jahrgang/Band: | 25 |
Ausgabe/Heft: | 4 |
Erste Seite: | 11 |
Letzte Seite: | 13 |
Freie Schlagwörter: | Energy-dispersive X-ray spectroscopy; Materials science; Micro-XRF; Microanalysis; Scanning electron microscopy; X-ray fluorescence |
ISSN: | 2043-0655 |
Verfügbarkeit des Dokuments: | Datei im Netzwerk der BAM verfügbar ("Closed Access") |
Datum der Freischaltung: | 19.02.2016 |
Referierte Publikation: | Nein |