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Requirements on glasses for femtosecond-laser based micro-structuring

  • In this work, glasses with systematically varied compositions were manufactured and irradiated by single Ti:sapphire fs-laserpulses (800 nm, 120 fs), focused at the surface and into the bulk of the glass materials. The samples were tested for their ablation threshold fluence as well as for structural changes using µ-Raman-spectroscopy. Correlations between the glass composition, the material-ablation on the glass surface and the permanent changes of the refractive index inside the glass volume after the irradiation by fs-laser pulses were obtained. The results show, that the structural modifications found at the surface of the glasses and inside its volume are closely related. However, while the ablation threshold fluence of the glass surface primarily depends on the glass dissociation energy, the permanent refractive index change inside the volume is rather determined by its ability for absorbing the fs-laser pulses and the subsequent relaxation processes. The results of this workIn this work, glasses with systematically varied compositions were manufactured and irradiated by single Ti:sapphire fs-laserpulses (800 nm, 120 fs), focused at the surface and into the bulk of the glass materials. The samples were tested for their ablation threshold fluence as well as for structural changes using µ-Raman-spectroscopy. Correlations between the glass composition, the material-ablation on the glass surface and the permanent changes of the refractive index inside the glass volume after the irradiation by fs-laser pulses were obtained. The results show, that the structural modifications found at the surface of the glasses and inside its volume are closely related. However, while the ablation threshold fluence of the glass surface primarily depends on the glass dissociation energy, the permanent refractive index change inside the volume is rather determined by its ability for absorbing the fs-laser pulses and the subsequent relaxation processes. The results of this work provide some guidance on how the glass composition can be varied in order to optimize the fs-laser induced modification of dielectrics.zeige mehrzeige weniger

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Metadaten
Autoren/innen:T. Seuthe, M. Grehn, A. Mermillod-Blondin, Jörn Bonse, M. Eberstein
Dokumenttyp:Beitrag zu einem Tagungsband
Veröffentlichungsform:Verlagsliteratur
Sprache:Englisch
Titel des übergeordneten Werkes (Englisch):CICMT 2015 - 11th International conference on ceramic interconnect & ceramic microsystems technologies (Proceedings)
Jahr der Erstveröffentlichung:2015
Organisationseinheit der BAM:6 Materialschutz und Oberflächentechnik
6 Materialschutz und Oberflächentechnik / 6.4 Technologien mit Nanowerkstoffen
Herausgeber (Institution):International Microelectronics and Packaging Society
Verlag:Curran
Verlagsort:Red Hook, NY, USA
Erste Seite:47
Letzte Seite:53
Veranstaltung:11th International Conference on Ceramic Interconnect & Ceramic Microsystems Technologies
Veranstaltungsort:Dresden, Germany
Beginndatum der Veranstaltung:20.04.2015
Enddatum der Veranstaltung:23.04.2015
DOI:https://doi.org/10.4071/CICMT-TA24
ISBN:978-1-5108-0456-2
Verfügbarkeit des Dokuments:Datei im Netzwerk der BAM verfügbar ("Closed Access")
Datum der Freischaltung:20.02.2016
Referierte Publikation:Nein