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Femtosecond laser micromachining of technical materials

  • Micromachining experiments were performed with Ti:sapphire laser pulses (130 fs - 150 fs, 800 nm, approximately 10 Hz) in air. Employing the direct focusing technique, highly absorbing titanium nitride (TiN) and weakly absorbing polyimide (PI) and polymethylmethacrylate (PMMA) served as target materials. The lateral and vertical precision of the laser ablation and morphological features were characterized by scanning force (SFM), scanning electron (SEM) and optical microscopy. For TiN, incubation can be observed, i.e. the single-pulse surface damage threshold (0.26 J/cm2) is by a factor of two greater than the threshold for 100 pulses. Ablation rates below 10 nm per pulse can be achieved. The evolution of sub-wavelength ripples is presented in dependence on pulse number and laser fluence, respectively. The incubation behavior of the polymers can be described by an accumulation model as for TiN. Experiments on PI with varying focal lengths result in the same modification thresholds.Micromachining experiments were performed with Ti:sapphire laser pulses (130 fs - 150 fs, 800 nm, approximately 10 Hz) in air. Employing the direct focusing technique, highly absorbing titanium nitride (TiN) and weakly absorbing polyimide (PI) and polymethylmethacrylate (PMMA) served as target materials. The lateral and vertical precision of the laser ablation and morphological features were characterized by scanning force (SFM), scanning electron (SEM) and optical microscopy. For TiN, incubation can be observed, i.e. the single-pulse surface damage threshold (0.26 J/cm2) is by a factor of two greater than the threshold for 100 pulses. Ablation rates below 10 nm per pulse can be achieved. The evolution of sub-wavelength ripples is presented in dependence on pulse number and laser fluence, respectively. The incubation behavior of the polymers can be described by an accumulation model as for TiN. Experiments on PI with varying focal lengths result in the same modification thresholds. Different polarization states of light (linear, circular) lead to a variation of the ablation rate and to various morphological patterns in the ablation craters (wavelength ripples, cones). Swelling of PMMA occurred at fluences below the ablation threshold.zeige mehrzeige weniger

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Metadaten
Autoren/innen:Jörn Bonse, Steffen Baudach, Jörg Krüger, Wolfgang Kautek
Persönliche Herausgeber/innen:C. Phipps
Dokumenttyp:Beitrag zu einem Sammelband
Veröffentlichungsform:Verlagsliteratur
Sprache:Englisch
Titel des übergeordneten Werkes (Englisch):High-power laser ablation III
Jahr der Erstveröffentlichung:2000
Verlag:SPIE
Verlagsort:Bellingham, Wash.
Ausgabe/Heft:4065
Erste Seite:161
Letzte Seite:172
Freie Schlagwörter:Ablation; Femtosecond pulse laser; Laser processing; Micromachining; Polymer; Ripples; Titanium nitride
Veranstaltung:3rd SPIE's International Conference on High-Power Laser Ablation
Veranstaltungsort:Santa Fe, NM, USA
Beginndatum der Veranstaltung:24.04.2000
Enddatum der Veranstaltung:28.04.2000
DOI:https://doi.org/10.1117/12.407346
ISSN:1605-7422
ISBN:0-8194-3700-X
Bemerkung:
Serientitel: SPIE proceedings series – Series title: SPIE proceedings series
Verfügbarkeit des Volltexts:Weder Volltext-PDF noch papiergebundenes Belegexemplar vorhanden ("No Access")
Datum der Freischaltung:19.02.2016
Referierte Publikation:Nein