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Scanning force microscopic investigations of the femtosecond pulse laser ablation of indium phosphide in air

  • Laser ablation of single-crystalline indium phosphide (InP) was performed in air by means of linearly polarized Ti:sapphire femtosecond-pulses (800 nm, 130 fs, 10 Hz). As a result of the first laser pulses, several morphological changes (crater formation, rim formation, ripple structures and cones) were observed. These effects were explored using force modulation microscopy (FMM), a technique based on scanning force microscopy (SFM), allowing the simultaneous imaging of both topography and local stiffness at a high lateral resolution. The first laser pulse induces the formation of a protruding rim (height <20 nm, width ~300 nm) bordering the ablated crater. A Fourier-analysis of the multi-pulse generated topographies reveals the formation of wavelength-sized periodic ripples (modulation depth <100 nm) with an orientation perpendicular to that of the electric field vector of the laser radiation. Besides these morphological alterations, also material modifications were observed in theLaser ablation of single-crystalline indium phosphide (InP) was performed in air by means of linearly polarized Ti:sapphire femtosecond-pulses (800 nm, 130 fs, 10 Hz). As a result of the first laser pulses, several morphological changes (crater formation, rim formation, ripple structures and cones) were observed. These effects were explored using force modulation microscopy (FMM), a technique based on scanning force microscopy (SFM), allowing the simultaneous imaging of both topography and local stiffness at a high lateral resolution. The first laser pulse induces the formation of a protruding rim (height <20 nm, width ~300 nm) bordering the ablated crater. A Fourier-analysis of the multi-pulse generated topographies reveals the formation of wavelength-sized periodic ripples (modulation depth <100 nm) with an orientation perpendicular to that of the electric field vector of the laser radiation. Besides these morphological alterations, also material modifications were observed in the irradiated regions by means of the FFM technique. Within the ablated craters, local stiffness variations were found revealing an inhomogeneous material composition/structure as a consequence of the femtosecond pulse laser treatment.zeige mehrzeige weniger

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Metadaten
Autor*innen:Jörn BonseORCiD, Martin Munz, Heinz SturmORCiD
Persönliche Herausgeber*innen:R. Vajtai
Dokumenttyp:Beitrag zu einem Tagungsband
Veröffentlichungsform:Verlagsliteratur
Sprache:Englisch
Titel des übergeordneten Werkes (Englisch):Nanotechnology 2003
Jahr der Erstveröffentlichung:2003
Verlag:SPIE, the International Society for Optical Engineering
Verlagsort:Bellingham, Wash.
Ausgabe/Heft:5118
Erste Seite:221
Letzte Seite:234
Freie Schlagwörter:Femtosecond laser irradiation; Indium phosphide; Laser induced periodic surface structures (LIPSS); Microstructure; Scanning/atomic force microscopy (SFM/AFM); Stiffness
Veranstaltung:Nanotechnology Conference 2003
Veranstaltungsort:Maspalomas, Gran Canaria, Spain
Beginndatum der Veranstaltung:2003-05-19
Enddatum der Veranstaltung:2003-05-21
URL:http://cat.inist.fr/?aModele=afficheN&cpsidt=15329222
ISBN:0-8194-4978-4
Bemerkung:
Serientitel: SPIE proceedings series – Series title: SPIE proceedings series
Verfügbarkeit des Dokuments:Physisches Exemplar in der Bibliothek der BAM vorhanden ("Hardcopy Access")
Bibliotheksstandort:Sonderstandort: Publica-Schrank
Datum der Freischaltung:19.02.2016
Referierte Publikation:Nein
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