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Tribological and mechanical investigation of SiO2 and Si3N4 coatings on fused silica and borosilicate glass

  • Amorphous SiO2 and Si3N4 plasma-enhanced chemical vapour deposited (PECVD) coatings were deposited on two different substrate materials (fused silica and borosilicate glass), with three coating thicknesses (0.1, 0.5, and 1.0 µm). The mechanical properties (hardness and elastic modulus) were determined by depth-sensing indentation, with loads from 700 mN down to 0.1 mN. Tribological behaviour was studied in instrumented oscillating sliding tests at room temperature with a ball-on-flat arrangement, in which the coated disc was tested against an alumina ball, at a load of 1 N. Interpretation of the measurement of hardness and modulus of the coatings has to take into consideration the influence of layer thickness and the effect of the substrate. Tensile film stress and crack generation were only observed for Si3N4 on fused silica above a threshold thickness. Friction and wear measurements show that the coating has an effect on friction, while wear is affected by the thin coatings only forAmorphous SiO2 and Si3N4 plasma-enhanced chemical vapour deposited (PECVD) coatings were deposited on two different substrate materials (fused silica and borosilicate glass), with three coating thicknesses (0.1, 0.5, and 1.0 µm). The mechanical properties (hardness and elastic modulus) were determined by depth-sensing indentation, with loads from 700 mN down to 0.1 mN. Tribological behaviour was studied in instrumented oscillating sliding tests at room temperature with a ball-on-flat arrangement, in which the coated disc was tested against an alumina ball, at a load of 1 N. Interpretation of the measurement of hardness and modulus of the coatings has to take into consideration the influence of layer thickness and the effect of the substrate. Tensile film stress and crack generation were only observed for Si3N4 on fused silica above a threshold thickness. Friction and wear measurements show that the coating has an effect on friction, while wear is affected by the thin coatings only for a short running-in phase. The morphology of the wear scars indicates that the coatings have good adhesion. Despite crack generation, delamination effects were not observed. Indentation patterns similarly showed excellent lateral homogeneity of the mechanical properties over the entire film surface, and indicated that load-displacement curves may be used to characterise the system.zeige mehrzeige weniger

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Metadaten
Autor*innen:Dieter Klaffke, Uwe Beck
Dokumenttyp:Zeitschriftenartikel
Veröffentlichungsform:Verlagsliteratur
Sprache:Englisch
Titel des übergeordneten Werkes (Englisch):TriboTest
Jahr der Erstveröffentlichung:2001
Verlag:Coppin
Verlagsort:Deal
Jahrgang/Band:8
Ausgabe/Heft:1
Erste Seite:57
Letzte Seite:72
Freie Schlagwörter:Depth-sensing indentation; Friction; Mechanical properties; Oscillating sliding test; PECVD; Si3N4 coating; SiO2 coating; Wear
DOI:10.1002/tt.3020080105
ISSN:1354-4063
ISSN:1557-685X
Verfügbarkeit des Dokuments:Physisches Exemplar in der Bibliothek der BAM vorhanden ("Hardcopy Access")
Bibliotheksstandort:Sonderstandort: Publica-Schrank
Datum der Freischaltung:19.02.2016
Referierte Publikation:Nein
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