• Treffer 1 von 1
Zurück zur Trefferliste

Determination of mechanical film properties of a bilayer system due to elastic indentation measurements with a spherical indenter

  • A recently developed theoretical model represents the generalization of the indentation of a sphere into an infinite homogeneous halfspace to the problem of a Hertzian load acting on a halfspace covered with one or more films having different elastic properties. The model allows the analytical calculation of the complete elastic stress field and the deformations within the films and the substrate. Some results of the model shall be confirmed by nanoindentation experiments using an UMIS-2000 nanoindenter into Si3N4/SiO2 and SiO2/ Si3N4 double layers on BK7 glass and Si(100) single crystal. The materials used allow accurate measurements due to their homogeneous, amorphous structure as well as low surface and interface roughness. After the determination of the instrument compliance and the real, depth dependent indenter radius the measured load–depth data are compared with calculated results. It is shown that measurement results can be correctly interpreted by the model. The onset ofA recently developed theoretical model represents the generalization of the indentation of a sphere into an infinite homogeneous halfspace to the problem of a Hertzian load acting on a halfspace covered with one or more films having different elastic properties. The model allows the analytical calculation of the complete elastic stress field and the deformations within the films and the substrate. Some results of the model shall be confirmed by nanoindentation experiments using an UMIS-2000 nanoindenter into Si3N4/SiO2 and SiO2/ Si3N4 double layers on BK7 glass and Si(100) single crystal. The materials used allow accurate measurements due to their homogeneous, amorphous structure as well as low surface and interface roughness. After the determination of the instrument compliance and the real, depth dependent indenter radius the measured load–depth data are compared with calculated results. It is shown that measurement results can be correctly interpreted by the model. The onset of plastic deformation is investigated for the same samples by multiple partial unloading experiments with a 4-µm radius diamond sphere. The critical load at which a first deviation from a wholly elastic response occurs is used for a stress calculation with the model. The mechanical behavior of the different film combinations is interpreted by means of the von Mises comparison stress. The measured results, together with the analytical modeling, allow an optimization of the thickness and modulus of the individual layers to get a maximum mechanical stability.zeige mehrzeige weniger

Volltext Dateien herunterladen

  • 1-s2.0-S0040609000013651-main.pdf
    eng

Metadaten exportieren

Weitere Dienste

Teilen auf Twitter Suche bei Google Scholar Anzahl der Zugriffe auf dieses Dokument
Metadaten
Autor*innen:T. Chudoba, N. Schwarzer, F. Richter, Uwe Beck
Dokumenttyp:Zeitschriftenartikel
Veröffentlichungsform:Verlagsliteratur
Sprache:Englisch
Titel des übergeordneten Werkes (Englisch):Thin solid films
Jahr der Erstveröffentlichung:2000
Verlag:Elsevier
Verlagsort:Amsterdam
Jahrgang/Band:377-378
Erste Seite:366
Letzte Seite:372
Freie Schlagwörter:Depth sensing indendation; Mechanical properties; Spherical indenter; Young´s modulus
DOI:10.1016/S0040-6090(00)01365-1
ISSN:0040-6090
Verfügbarkeit des Dokuments:Datei im Netzwerk der BAM verfügbar ("Closed Access")
Datum der Freischaltung:19.02.2016
Referierte Publikation:Ja
Datum der Eintragung als referierte Publikation:09.03.2012
Einverstanden
Diese Webseite verwendet technisch erforderliche Session-Cookies. Durch die weitere Nutzung der Webseite stimmen Sie diesem zu. Unsere Datenschutzerklärung finden Sie hier.