Long-term stability of a MEIS low energy hydrogen sensor
- A hydrogen sensor based on a silicon Metal/Solid Electrolyte/Insulator/Semiconductor (MEIS) structure with thin layers of the super-ionic conductor LaF3 and Pd gate metal was investigated in a hybrid structure on a resistance heater mounted on a ceramic substrate. The sensor was operated at room temperature, however, a short heating impulse once a day ensures a fast and reproducible dynamic behavior. The sensor was characterized in the concentration range typical for alarm levels up to 40% of the lower flammability limit and shows a logarithmic dependency of the sensor signal from the hydrogen concentration and a mean sensitivity of about 140 mV/decade. The response time (t90) is about 8 s. In a long term test for a period of three month, the sensor was exposed to hydrogen every two weeks. The sensor signal was shown to be stable in dynamic behavior, sensitivity and signal difference.
Autor*innen: | M. Lang, Ulrich Banach, K. Nörthemann, A.-K. Gerlitzke, M. Milstrey, R. Kaufer, M. Woratz, Thomas Hübert, W. Moritz |
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Dokumenttyp: | Zeitschriftenartikel |
Veröffentlichungsform: | Verlagsliteratur |
Sprache: | Englisch |
Titel des übergeordneten Werkes (Englisch): | Sensors and actuators B: Chemical |
Jahr der Erstveröffentlichung: | 2013 |
Verlag: | Elsevier |
Verlagsort: | Amsterdam [u.a.] |
Jahrgang/Band: | 187 |
Erste Seite: | 395 |
Letzte Seite: | 400 |
Freie Schlagwörter: | Hydrogen detection; Long-term measurement; Low energy sensor; MEIS-structure |
DOI: | 10.1016/j.snb.2012.12.081 |
ISSN: | 0925-4005 |
ISSN: | 1873-3077 |
Verfügbarkeit des Dokuments: | Physisches Exemplar in der Bibliothek der BAM vorhanden ("Hardcopy Access") |
Bibliotheksstandort: | Sonderstandort: Publica-Schrank |
Datum der Freischaltung: | 20.02.2016 |
Referierte Publikation: | Ja |
Datum der Eintragung als referierte Publikation: | 14.10.2013 |