TY - JOUR A1 - Eberle, Arno A1 - Sievert, Rainer A1 - Schiller, Wolfgang Arno T1 - Flip-Chip-Lotbumps thermisch-zyklisch belastet - Einfluß des Substratmaterials auf das viskoplastische Verhalten von Flip-Chip-Lotbumps PY - 1998 SN - 0025-5300 VL - 40 IS - 9 SP - 350 EP - 352 PB - Carl Hanser Verlag CY - München AN - OPUS4-33715 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Reier, T. A1 - Schultze, J. W. A1 - Österle, Werner A1 - Buchal, C. T1 - Nucleation and growth of AlN nanocrystallites prepared by N+2 implantation N2 - The formation of AlN films prepared by N+2 ion implantation into aluminium was investigated using X-ray and Auger photoelectron spectroscopy ( XPS, AES) as well as cross-sectional transmission electron microscopy (XTEM). After 100-keV N+2 implantation of low doses (1×1017 cm−2), the formation of hexagonal AlN nanocrystals (crystal size <5 nm, Ncrystal=1017 cm−3) was observed. Their orientation is strongly correlated with the aluminium matrix. With the dose increasing to 3×1017 cm−2, crystal growth follows, finally forming a homogeneous AlN-layer. Furthermore, the diffraction patterns show an increasing amount of misorientation with increasing dose. From the crystal size distribution, we conclude that continuous nucleation takes place. Samples implanted with an energy of 3 keV exhibit analogous behaviour. Nitride growth was further investigated using microstructured AlN formed by 3-keV implantation through movable TEM-masks (structure size: 15–150 mm). In the case of high N+2 doses (D&5×1017 cm−2), AlN is detected by AES in the shielded area at a distance of up to 10 mm from the exposed region. The Diffusion coefficient was calculated to be 10−10 cm2 s−1. The formation of AlN proceeds in two steps. After a continuous nucleation, diffusion-assisted Crystal growth takes place until a homogeneous AlN layer results. KW - Aluminium nitride KW - Ion implantation KW - Nanocrystallites KW - Surface analysis KW - XTEM PY - 1998 SN - 0257-8972 VL - 103-104 SP - 415 EP - 420 PB - Elsevier AN - OPUS4-38539 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kuhmann, J. F. A1 - Chiang, C. H. A1 - Harde, P. A1 - Reier, F. A1 - Österle, Werner A1 - Urban, Ingrid A1 - Klein, A. T1 - Pt thin-film metallization for FC-bonding using SnPb60/40 solder bump metallurgy N2 - Platinum does not form any adherent oxides and can be easily wetted by tin-based solders. Platinum is also an available metallization in semiconductor laboratories. Therefore we investigated the diffusion of platinum thin-film metallizations into eutectic tin–lead solder by using a high-resolution secondary ion mass spectroscopy (SIMS) profiling from the back side. It is shown that an intermetallic phase (PtSn4) is formed during soldering, which controls the consumption of platinum during soldering and in operation. The consumption of platinum follows the well-known parabolic diffusion law. The activation energy of this process is 0.63 eV. Even at extended heating cycles of 2 min at 250°C, 190 nm from the original 300 nm of the platinum film remain undissolved. This high stability makes platinum a very attractive thin-film metallization for flip-chip (FC) bonding of new microsystems. KW - Pt thin film metallization KW - FC solder bonding KW - Diffusion KW - SIMS PY - 1998 SN - 0921-5093 VL - A242 SP - 22 EP - 25 PB - Elsevier AN - OPUS4-38540 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN ED - Wloka, Monika T1 - DAR-aktuell - Kurzinformation - Akkreditierung, Zertifizierung, Prüfung - Jahrgang 6, Ausgabe 1 T1 - DAR-aktuell - newsletter - accreditation, certification, testing - volume 6, edition 1 N2 - Die hier vorliegende Kurzinformation hat das Ziel, über Neues auf dem Gebiet der Akkreditierung, Zertifizierung und Prüfung in Deutschland und Europa sowie über Inhalte und Ergebnisse der Arbeit verschiedener auf diesem Sektor tätigen Organisationen zu informieren. N2 - The aim of this newsletter is to inform about new developments in the area of accreditation, certification and testing in Germany and Europe as well as about topics and results of the work of several organisations that are active in this sector. PY - 1998 SN - 1436-154X SN - 1436-1558 SN - 1436-2082 N1 - Volltext (PDF) in deutsch und englisch - Full text (PDF) in German and English VL - 6 IS - 1 SP - 1 EP - 4 PB - Bundesanstalt für Materialforschung und -prüfung (BAM) CY - Berlin AN - OPUS4-40146 LA - mul AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN ED - Wloka, Monika T1 - DAR-aktuell - Kurzinformation - Akkreditierung, Zertifizierung, Prüfung - Jahrgang 6, Ausgabe 2 T1 - DAR-aktuell - newsletter - accreditation, certification, testing - volume 6, edition 2 N2 - Die hier vorliegende Kurzinformation hat das Ziel, über Neues auf dem Gebiet der Akkreditierung, Zertifizierung und Prüfung in Deutschland und Europa sowie über Inhalte und Ergebnisse der Arbeit verschiedener auf diesem Sektor tätigen Organisationen zu informieren. N2 - The aim of this newsletter is to inform about new developments in the area of accreditation, certification and testing in Germany and Europe as well as about topics and results of the work of several organisations that are active in this sector. PY - 1998 SN - 1436-154X SN - 1436-1558 SN - 1436-2082 N1 - Volltext (PDF) in deutsch und englisch - Full text (PDF) in German and English VL - 6 IS - 2 SP - 1 EP - 4 PB - Bundesanstalt für Materialforschung und -prüfung (BAM) CY - Berlin AN - OPUS4-40147 LA - mul AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN ED - Wloka, Monika T1 - DAR-aktuell - Kurzinformation - Akkreditierung, Zertifizierung, Prüfung - Jahrgang 6, Ausgabe 3 T1 - DAR-aktuell - newsletter - accreditation, certification, testing - volume 6, edition 3 N2 - Die hier vorliegende Kurzinformation hat das Ziel, über Neues auf dem Gebiet der Akkreditierung, Zertifizierung und Prüfung in Deutschland und Europa sowie über Inhalte und Ergebnisse der Arbeit verschiedener auf diesem Sektor tätigen Organisationen zu informieren. N2 - The aim of this newsletter is to inform about new developments in the area of accreditation, certification and testing in Germany and Europe as well as about topics and results of the work of several organisations that are active in this sector. PY - 1998 SN - 1436-154X SN - 1436-1558 SN - 1436-2082 N1 - Volltext (PDF) in deutsch und englisch - Full text (PDF) in German and English VL - 6 IS - 3 SP - 1 EP - 4 PB - Bundesanstalt für Materialforschung und -prüfung (BAM) CY - Berlin AN - OPUS4-40148 LA - mul AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Schartel, Bernhard A1 - Krüger, Simone A1 - Wachtendorf, Volker A1 - Hennecke, Manfred T1 - Chemiluminescence - A promising new testing method for plastic optical fibres? T2 - 7th International Plastic Optical Fibres Conference (POF-7) CY - Berlin, Germany DA - 1998-10-05 PY - 1998 SN - 3-905084-55-4 VL - 7 SP - 248 EP - 249 PB - AKM AG CY - Basel AN - OPUS4-2433 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Ralph-Peter A1 - Falkenhagen, Jana A1 - Much, Helmut A1 - Schulz, Günter T1 - Characterization of silicon polymers by means of different liquid chromatographic modes and MALDI-TOF-MS T2 - DFG-Symposium zum Schwerpunktprogramm "Silicium-Chemie" CY - Werfenweng, Austria DA - 1998-06-11 PY - 1998 AN - OPUS4-2237 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Ralph-Peter A1 - Falkenhagen, Jana A1 - Much, Helmut A1 - Schulz, Günter A1 - Rikowski, E. T1 - Characterization of silicon polymers (silsesquioxanes, dendrimers and copolymers) by means of different modes of Liquid Chromatography and MALDI-TOF-MS T2 - ISPAC-11 CY - Santa Margherita Ligure, Italy DA - 1998-05-25 PY - 1998 AN - OPUS4-3415 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Ralph-Peter A1 - Falkenhagen, Jana A1 - Much, Helmut A1 - Schulz, Günter A1 - Rikowski, E. T1 - Characterization of silicon polymers (silsesquioxanes, dendrimers and copolymers) by means of different modes of Liquid Chromatography and MALDI-TOF-MS T2 - Analytica Conference '98 CY - Munich, Germany DA - 1998-04-21 PY - 1998 AN - OPUS4-3414 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -