TY - CONF A1 - Weinel, Kristina T1 - Electron-beam induced particle synthesis: Phenomenological study of the physical mechanisms N2 - Several studies have shown that the electron beam (e-beam) can be used to create nanomaterials from microparticles in situ in a TEM. However, attempts to produce gold nanoparticles (NPs) on silicon oxide substrate remained to be accomplished. Here, we show that the production of gold NPs is possible by using the e-beam in a SEM, under a set of parameters. To understand the physical mechanisms leading to the gold NPs, the mechanisms of e-beam induced charging as well as e-beam induced heating of the MPs were discussed. Several hints point to heating as the driving mechanism. T2 - IFW Dresden, Seminar CY - Dresden, Germany DA - 06.12.2023 KW - Electron-beam-induced modification KW - Nanoparticle synthesis KW - Scanning electron microscopy KW - Driving physical mechanism KW - Negative charged microparticle KW - Temperature driven process PY - 2023 AN - OPUS4-59081 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -