TY - JOUR A1 - Macková, A. A1 - Jagerová, A. A1 - Lailik, O. A1 - Miksová, R. A1 - Poustka, D. A1 - Mistrík, J. A1 - Holý, V. A1 - Schütter, Jan David A1 - Kentsch, U. A1 - Marvan, P. A1 - Azarov, A. A1 - Galeckas, A. T1 - Combined Au/Ag nanoparticle creation in ZnO nanopillars by ion implantation for optical response modulation and photocatalysis N2 - ZnO nanopillars were implanted with Au-400 keV and Ag-252 keV ions with ion fluences from 1 × 10^15 cm^2 to 1 × 10^16 cm^2. We compared ZnO nanopillars solely implanted with Au-ions and dually-implanted with Au and Ag-ions. Rutherford Back-Scattering spectrometry (RBS) confirmed Ag and Au embedded in ZnO nanopillar layers in a reasonable agreement with theoretical calculations. A decreasing thickness of the ZnO nanopillar layer was evidenced with the increasing ion implantation fluences. Spectroscopic Ellipsometry (SE) showed a decrease of refractive index in the nanopillar parts with embedded Au, Ag-ions. XRD discovered vertical domain size decreasing with the proceeding radiation damage accumulated in ZnO nanopillars which effect was preferably ascribed to Au-ions. SE and diffuse reflectance spectroscopy (DRS) showed optical activity of the created nanoparticles at wavelength range 500 – 600 nm and 430 – 700 nm for the Au-implanted and Au, Ag-implanted ZnO nanopillars, respectively. Photoluminescence (PL) features linked to ZnO deep level emission appear substantially enhanced due to plasmonic interaction with metal nanoparticles created by Ag, Au-implantation. Photocatalytic activity seems to be more influenced by the nanoparticles presented in the layer rather than the surface morphology. Dual implantation with Ag, Au-ions enhanced optical activity to a larger extent without significant morphology deterioration as compared to the solely Au-ion implanted nanopillars. KW - ZnO nanopillars KW - Au/Ag nanoparticles, KW - Ion implantation KW - SPR KW - Doped ZnO nanostructures PY - 2022 U6 - https://doi.org/10.1016/j.apsusc.2022.155556 SN - 0169-4332 VL - 610 SP - 1 EP - 13 PB - Elsevier B.V. AN - OPUS4-56306 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Macková, A. A1 - Malinský, P. A1 - Jagerová, A. A1 - Mikšová, A. A1 - Lalik, O. A1 - Nekvindová, P. A1 - Mistrík, J. A1 - Marvan, P. A1 - Sofer, Z. A1 - Holý, V. A1 - Schütter, Jan David A1 - Kentsch, U. A1 - Azarov, A. A1 - Galeckas, A. T1 - Energetic Au ion beam implantation of ZnO nanopillars for optical response modulation N2 - Nanopillars of ZnO were implanted with Au-400 keV ions at various ion fluences from 1 × 1015 cm−2 to 1 × 1016 cm−2 and subsequently annealed at 750 °C for 15 min in order to reduce the implantation damage and to support Au nanoparticle (NP) aggregation. It was found that implantation-induced effects and thermal effects influence the Au NP coalescence as well as the quality of the ZnO nanopillars. Rutherford Back-Scattering spectrometry (RBS) showed the broader Au-depth profiles than it was theoretically predicted, but the Au-concentration maximum agrees well with prediction taking into account the effective ZnO layer density. The implantation at the higher fluences induced the morphology modification of the nanopillar layer evidenced by RBS and scanning electron microscopy (SEM). An indirect evidence of this effect was given by optical ellipsometry due to gradual refractive index changes in the ZnO nanopillars with the increased Au-ion fluence. Optical characterization of the Au-implanted and annealed nanopillars performed by means of photoluminescence (PL) and diffuse-reflectance spectroscopy (DRS) evidenced the surface plasmon resonance (SPR) activity of the embedded Au NPs. The SPR-enhanced scattering and PL emission observed in the spectral range 500–650 nm are ascribed to Au NPs or more complex Au-clusters. In addition, the ellipsometry measurements of extinction coefficient are found to corroborate well results from DRS, both indicating increase of SPR effect with the increase of Au-ion fluence and after the post-annealing. KW - ZnO nanopillars KW - Ion beam implantation PY - 2022 U6 - https://doi.org/10.1088/1361-6463/ac5486 VL - 55 IS - 21 SP - 1 EP - 14 PB - IOP Publishing AN - OPUS4-54394 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -