TY - CHAP A1 - Bonse, Jörn A1 - Kirner, Sabrina V. A1 - Krüger, Jörg ED - Sugioka, K. T1 - Laser-Induced Periodic Surface Structures (LIPSS) N2 - Laser-induced periodic surface structures (LIPSS) are a universal phenomenon and can be generated on almost any material by irradiation with linearly polarized radiation. This chapter reviews the current state in the field of LIPSS, which are formed in a “self-ordered” way and are often accompanying materials processing applications. LIPSS can be produced in a single-stage process and enable surface nanostructuring and, in turn, adaption of optical, mechanical, and chemical surface properties. Typically, they feature a structural size ranging from several micrometers down to less than 100 nm and show a clear correlation with the polarization direction of the light used for their generation. Various types of LIPSS are classified, relevant control parameters are identified, and their material-specific formation mechanisms are analyzed for different types of inorganic solids, i.e., metals, semiconductors, and dielectrics. Finally, technological applications featuring surface functionalization in the fields of optics, fluidics, medicine, and tribology are discussed. KW - Laser-induced periodic surface structures (LIPSS) KW - Femtosecond laser KW - Laser ablation KW - Microstructures KW - Nanostrcutures PY - 2021 SN - 978-3-030-63646-3 (Print) SN - 978-3-030-63647-0 (Online) U6 - https://doi.org/10.1007/978-3-030-63647-0_17 SP - 879 EP - 936 PB - Springer-Nature Switzerland AG CY - Cham ET - 1 AN - OPUS4-53728 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -