TY - CONF A1 - Backes, Sebastian A1 - Cappella, Brunero T1 - Force distance curves (FDC) & contact resionance (CR) measurement modes for mechanical property measurements N2 - At the Stakeholder meeting of the EMPIR project “Multifunctional ultrafast microprobes for on-the-machine measurements”, details about two measurement modes were presented. Force distance curves and contact resonance measurements are compared. The basic principles are explained and exemplary measurements concerning mechanical properties of polymers are shown. T2 - 19th International Conference and Exhibition (European Society for Precision Engineering and Nanotechnology/EUSPEN) CY - Bilbao, Spain DA - 03.06.2019 KW - Force distance curve KW - Contact resonance KW - Lubricants KW - Photoresist PY - 2019 AN - OPUS4-49905 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -