TY - JOUR A1 - Florian, Camilo A1 - Fischer, Daniel A1 - Freiberg, K. A1 - Duwe, M. A1 - Sahre, Mario A1 - Schneider, S. A1 - Hertwig, Andreas A1 - Krüger, Jörg A1 - Rettenmayr, M. A1 - Beck, Uwe A1 - Undisz, A. A1 - Bonse, Jörn T1 - Single Femtosecond Laser-Pulse-Induced Superficial Amorphization and Re-Crystallization of Silicon N2 - Superficial amorphization and re-crystallization of silicon in <111> and <100> orientation after irradiation by femtosecond laser pulses (790 nm, 30 fs) are studied using optical imaging and transmission electron microscopy. Spectroscopic imaging ellipsometry (SIE) allows fast data acquisition at multiple wavelengths and provides experimental data for calculating nanometric amorphous layer thickness profiles with micrometric lateral resolution based on a thin-film layer model. For a radially Gaussian laser beam and at moderate peak fluences above the melting and below the ablation thresholds, laterally parabolic amorphous layer profiles with maximum thicknesses of several tens of nanometers were quantitatively attained. The accuracy of the calculations is verified experimentally by high-resolution transmission electron microscopy (HRTEM) and energy dispersive X-ray spectroscopy (STEM-EDX). Along with topographic information obtained by atomic force microscopy (AFM), a comprehensive picture of the superficial re-solidification of silicon after local melting by femtosecond laser pulses is drawn. KW - Femtosecond laser KW - Silicon KW - Amorphization KW - Crystallization KW - Spectroscopic imaging ellipsometry PY - 2021 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-523687 UR - https://www.mdpi.com/1996-1944/14/7/1651 DO - https://doi.org/10.3390/ma14071651 SN - 1996-1944 VL - 14 IS - 7 SP - 1651-1 EP - 1651-21 PB - MDPI AG CY - Basel, Switzerland AN - OPUS4-52368 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Laser-induced periodic surface structures: mechanisms, applications, and unsolved problems N2 - Laser-induced Periodic Surface Structures (LIPSS, ripples) are a universal phenomenon and can be generated in a contactless, single-step process on almost any type of solid upon irradiation with intense laser pulses. They represent a (quasi-)periodic modulation of the surface topography in the form of a linear grating and are typically formed in a “self-ordered” way in the focus of a laser beam. Thus, they are often accompanying laser material processing applications. The structural sizes of LIPSS typically range from several micrometers down to less than 100 nanometers – far beyond the optical diffraction limit – while their orientations exhibit a clear correlation with the local polarization direction of the laser radiation. From a theoretical point of view, a controversial debate has emerged during the last decades, whether LIPSS originate from electromagnetic effects (seeded already during the laser irradiation) – or whether they emerge from matter-reorganization processes (distinctly after the laser irradiation). From a practical point of view, however, LIPSS represent a simple and robust way for the nanostructuring of solids that allows creating a wide range of different surface functionalities featuring applications in optics, tribology, medicine, energy technologies, etc. This presentation reviews the currently existent theories of LIPSS. A focus is laid on the historic development of the fundamental ideas behind the LIPSS, their corresponding mathematical descriptions and numerical implementations, along with a comparison and critical assessment of the different approaches. Fourth generation light sources, namely short wavelength, short pulse free electron lasers (FELs) are offering new and fascinating possibilities to resolve laser-induced structure formation at surfaces on the sub-micrometer to nanometer length scale and in temporal regimes ranging from picoseconds to several nanoseconds with sub-picosecond resolution. This unique spatio-temporal resolution allows to reveal early signatures of coherent/plasmonic electromagnetic scattering effects followed by the excitation of hydrodynamic capillary waves – providing new insights to the above-mentioned debate. Finally, some unsolved scientific problems related to LIPSS are identified and the pending technological limitations are discussed. While the currently available laser and scanner technology already allows large area surface processing with rates at the m2/min level, industrial applications of LIPSS are sometimes limited by the complex interplay between the nanoscale surface topography and the specific surface chemistry. This typically manifests in difficulties to control the processing of LIPSS and in limitations to ensure the long-term stability of the created surface functions. Strategies for overcoming such limitations are outlined. T2 - Institutskolloquium des Leibniz-Instituts für Oberflächenmodifizierung CY - Leipzig, Germany DA - 02.02.2023 KW - Laser-induced periodic surface structures (LIPSS) KW - Surface functionalization KW - Industrial applications KW - Femtosecond laser PY - 2023 AN - OPUS4-56949 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Surface nanotexturing by ultrashort laser pulses N2 - The presentation reviews the BAM activities in the field of surface processing by ultrashort laser pulses. A focus is laid on the generation of laser-induced periodic surface structures (LIPSS) which allow various surface functionalizations for applications in optics, tribology, liquid management, and medicine. T2 - Photonics Days Berlin Brandenburg 2022 CY - Berlin, Germany DA - 05.10.2022 KW - Laser-induced periodic surface structures (LIPSS) KW - Femtosecond laser KW - Surface functionalization PY - 2022 AN - OPUS4-55921 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CHAP A1 - Symietz, Christian A1 - Krüger, Jörg ED - Vilar, Rui T1 - Stability of laser surface modified implants N2 - A new technique to fix bioceramic powder on a titanium alloy by using femtosecond laser pulses is presented. It is shown that gentle fixation of a bioactive dielectric material on a metallic model implant is successful. This is potentially a new tool for the improvement of bone prostheses. An advantage of the ultrashort pulses is the very low heat influx into the whole sample. There is only a very thin interaction zone during the fixing, which is the metal surface in contact with the ceramic layer. Neither the fixed ceramic particles nor the major part of the metal suffer any modification. The stability of the model implant (ceramic on metal) is investigated by rotating bending fatigue tests. No indication of a reduction of the mechanical stability compared to untreated metallic reference samples was found. KW - Bone implant KW - Calcium phosphate coating KW - Femtosecond laser KW - Laser-induced fixation KW - Titanium alloy PY - 2016 SN - 978-0-08-100883-6 SN - 978-0-08-100942-0 DO - https://doi.org/10.1016/B978-0-08-100883-6.00004-6 SN - 2049-9485 IS - 111 SP - Chapter 4, 127 EP - 143 PB - Elsevier ET - 1st edition AN - OPUS4-36790 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Rudenko, A. A1 - Colombier, J.-P. A1 - Höhm, S. A1 - Rosenfeld, A. A1 - Krüger, Jörg A1 - Bonse, Jörn A1 - Itina, T.E. T1 - Spontaneous periodic ordering on the surface and in the bulk of dielectrics irradiated by ultrafast laser: a shared electromagnetic origin N2 - Periodic self-organization of matter beyond the diffraction limit is a puzzling phenomenon, typical both for surface and bulk ultrashort laser processing. Here we compare the mechanisms of periodic nanostructure formation on the surface and in the bulk of fused silica. We show that volume nanogratings and surface nanoripples having subwavelength periodicity and oriented perpendicular to the laser polarization share the same electromagnetic origin. The nanostructure orientation is defined by the near-field local enhancement in the vicinity of the inhomogeneous scattering centers. The periodicity is attributed to the coherent superposition of the waves scattered at inhomogeneities. Numerical calculations also support the multipulse accumulation nature of nanogratings formation on the surface and inside fused silica. Laser surface processing by multiple laser pulses promotes the transition from the high spatial frequency perpendicularly oriented nanoripples to the low spatial frequency ripples, parallel or perpendicular to the laser polarization. The latter structures also share the electromagnetic origin, but are related to the incident field interference with the scattered far-field of rough non-metallic or transiently metallic surfaces. The characteristic ripple appearances are predicted by combined electromagnetic and thermo-mechanical approaches and supported by SEM images of the final surface morphology and by time-resolved pump-probe diffraction measurements. KW - Laser-induced periodic surface structures (LIPSS) KW - Femtosecond laser KW - Nanostructures KW - Dielectrics KW - Electromagnetic scattering PY - 2017 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-421747 UR - https://www.nature.com/articles/s41598-017-12502-4 DO - https://doi.org/10.1038/s41598-017-12502-4 SN - 2045-2322 VL - 7 SP - Article 12306, 1 EP - 14 PB - Springer Nature AN - OPUS4-42174 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Femtosecond laser micromachining N2 - The presentation reviews femtosecond laser ablation experiments on metals, semiconductors, dielectrics, and biological materials. T2 - 19th Erwin Schrödinger Colloquium CY - Vienna, Austria DA - 24.09.2018 KW - Laser ablation KW - Laser micromachining KW - Femtosecond laser KW - Ultrashort pulse laser PY - 2018 AN - OPUS4-46075 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Legall, Herbert A1 - Schwanke, Christoph A1 - Pentzien, Simone A1 - Dittmar, G. A1 - Bonse, Jörn A1 - Krüger, Jörg T1 - X-ray emission as a potential hazard during ultrashort pulse laser material processing N2 - In laser machining with ultrashort laser pulses unwanted X-ray radiation in the keV range can be generated when a critical laser intensity is exceeded. Even if the emitted X-ray dose per pulse is low, high laser repetition rates can lead to an accumulation of X-ray doses beyond exposure safety limits. For 925 fs pulse duration at a center wavelength of 1030 nm, the X-ray emission was investigated up to an intensity of 2.6 × 10^14 W/cm2. The experiments were performed in air with a thin disk laser at a repetition rate of 400 kHz. X-ray spectra and doses were measured for various planar target materials covering a wide range of the periodic table from aluminum to tungsten. Without radiation shielding, the measured radiation doses at this high repetition rate clearly exceed the regulatory limits. Estimations for an adequate radiation shielding are provided. KW - Laser-induced X-ray emission KW - Ultrashort laser material interaction KW - Femtosecond laser KW - Radiation protection PY - 2018 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-448431 DO - https://doi.org/10.1007/s00339-018-1828-6 SN - 0947-8396 SN - 1432-0630 VL - 124 IS - 6 SP - Article 407, 1 EP - 8 PB - Springer AN - OPUS4-44843 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Legall, Herbert T1 - X-ray emission as a potential hazard during ultrashort pulse laser material processing N2 - Ultrashort laser pulse micromachining features a high precision. By increasing the repetition rate of the applied laser to several 100 kHz, laser processing becomes quick and cost-effective and make this method attractive for industrial applications. Upon exceeding a critical laser intensity, hard X-ray radiation is generated as a side effect. Even if the emitted X-ray dose per pulse is low, the accumulated X-ray dose becomes significant for high-repetition-rate laser systems so that radiation safety must be considered. The X-ray emission during ultrashort laser processing was investigated for an intensity range up to 2.6*10^14 W/cm2. The investigations were performed with a laser emitting pulses with 925 fs pulse duration, at 1030 nm wavelength and 400 kHz repetition rate. Steel, tungsten, and glass were studied in ambient air. Corresponding X-ray spectra and X-ray dose measurements were presented. Suitable radiation protection strategies were shown. T2 - European Materials Research Society (EMRS) Spring Meeting 2018, Symposium X “Photon-assisted synthesis and processing of materials in nano-microscale” CY - Strasbourg, France DA - 18.06.2018 KW - Laser-induced X-ray emission KW - Ultrashort laser material interaction KW - Femtosecond laser KW - Radiation protection PY - 2018 AN - OPUS4-45382 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Schwanke, Christoph T1 - X-ray emission as a potential hazard during ultrashort pulse laser material processing N2 - Ultrashort laser pulse micromachining features a high precision. By increasing the repetition rate of the applied laser to several 100 kHz, laser processing becomes quick and cost-effective and make this method attractive for industrial applications. Upon exceeding a critical laser intensity, hard X-ray radiation is generated as a side effect. Even if the emitted X-ray dose per pulse is low, the accumulated X-ray dose becomes significant for high-repetition-rate laser systems so that radiation safety must be considered. T2 - Informationsveranstaltung der PTB und des BfS zu Fragen der Bauartzulassungen CY - Bundesministerium für Umwelt, Naturschutz und nukleare Sicherheit, Berlin, Germany DA - 20.06.2018 KW - Laser-induced X-ray emission KW - Ultrashort laser material interaction KW - Femtosecond laser KW - Radiation protection PY - 2018 AN - OPUS4-45364 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Heitz, J. A1 - Plamadeala, C. A1 - Muck, M. A1 - Armbruster, O. A1 - Baumgartner, W. A1 - Weth, A. A1 - Steinwender, C. A1 - Plessberger, H. A1 - Kellermair, J. A1 - Kirner, Sabrina V. A1 - Krüger, Jörg A1 - Bonse, Jörn A1 - Guntner, A. S. A1 - Hassel, A. W. T1 - Femtosecond laser-induced microstructures on Ti substrates for reduced cell adhesion N2 - Miniaturized pacemakers with a surface consisting of a Ti alloy may have to be removed after several years from their implantation site in the heart and shall, therefore, not be completely overgrown by cells or tissue. A method to avoid this may be to create at the surface by laser-ablation self-organized sharp conical spikes, which provide too little surface for cells (i.e., fibroblasts) to grow on. For this purpose, Ti-alloy substrates were irradiated in the air by 790 nm Ti:sapphire femtosecond laser pulses at fluences above the ablation threshold. The laser irradiation resulted in pronounced microstructure formation with hierarchical surface morphologies. Murine fibroblasts were seeded onto the laser-patterned surface and the coverage by cells was evaluated after 3–21 days of cultivation by means of scanning electron microscopy. Compared to flat surfaces, the cell density on the microstructures was significantly lower, the coverage was incomplete, and the cells had a clearly different morphology. The best results regarding suppression of cell growth were obtained on spike structures which were additionally electrochemically oxidized under acidic conditions. Cell cultivation with additional shear stress could reduce further the number of adherent cells. KW - Laser Processing KW - Femtosecond laser KW - Titanium alloy KW - Cell adhesion KW - Anodic oxidation KW - Pacemaker PY - 2017 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-427681 UR - https://link.springer.com/article/10.1007/s00339-017-1352-0 DO - https://doi.org/10.1007/s00339-017-1352-0 SN - 0947-8396 SN - 1432-0630 VL - 123 IS - 12 SP - 734, 1 EP - 9 PB - Springer-Verlag CY - Berlin AN - OPUS4-42768 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -