TY - CONF A1 - Beck, Uwe A1 - Baier, Jennifa A1 - Hidde, Gundula A1 - Sahre, Mario A1 - Weise, Matthias A1 - Schelero, Natascha A1 - Dähne, L. A1 - Lerche, K.-H. T1 - Plasma compatibility of particles for functional PVD-coatings by ex-situ injection N2 - The validation of the plasma compatibility of particles is a prerequisite for their application in plasma dispersion layers. The goal is the realization of functional add-on features on surfaces, in films and coatings. Although intended applications primarily address nanoparticles, the compatibility tests were carried out at first with particles in the lower micrometer range in order to investigate material-, fluorescent marker- or surface-based degradation effects in a simple manner. Plasma compatibility implies at least the short-term acceptance of charged species, plasma-UV radiation, vacuum and elevated temperatures. Otherwise, effects on geometrical dimensions, chemical bonds, fluorescence efficiency and plastic-elastic properties are expected. The plasma compatibility of monodisperse fluorescent-labeled particles to microwave excitation was evaluated by means of microscopic and spectroscopic investigation methods (light, fluorescence, confocal, atomic force microscopy and FTIR). This study comprises particles of different materials (SiO₂, PMMA, PS, MF) and sizes (from 50 nm to 10 μm). A special preparation technique ensures that smallest geometry changes of particles can be measured by atomic force microscopy. For the selected plasma conditions (P = 600 W, f = 2.46 GHz, d = 10 cm) and an exposure time of 10 minutes, the geometry of SiO₂ particles (approx. 1.7 μm) remains nearly unchanged, whereas PS particles shrink in diameter by 6% and PMMA particles by 11%. For selected core-particles (SiO₂, MF) with fluorescencemarked (rhodamine) shell-polyelectrolytes no remarkable plasma degradation of the fluorescence intensity was observed for the above mentioned plasma conditions, however a doubling of exposure time already results in a significant decrease in intensity. Two different injection systems have been studied for the particle injection into the plasma deposition process. One of the selected systems also proves process compatibility regarding the expected pressure differences upon injection T2 - PARTEC 2016 - International Congress on Particle Technology CY - Nürnberg, Germany DA - 19.04.2016 KW - plasma dispersion layers KW - functional PVD coatings KW - particle injection PY - 2016 AN - OPUS4-37269 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -