TY - CONF A1 - Florian, Camilo A1 - Kirner, Sabrina V. A1 - Déziel, J.-L. A1 - Wonneberger, R. A1 - Undisz, A. A1 - Wasmuth, Karsten A1 - Spaltmann, Dirk A1 - Siegel, J. A1 - Krüger, Jörg A1 - Bonse, Jörn T1 - Influence of oxidation in the formation and performance of laser-induced periodic surface structures N2 - The fabrication of laser-induced periodic surface structures (LIPSS) has been reported for metallic, semiconductor and dielectric materials when irradiated with linearly polarized ultrashort laser pulses. Different sets of processing parameters have been identified and extensively studied, allowing the use of LIPSS for applications in medicine, tribology and surface wetting to name a few. One important parameter that is often not considered is the laser-induced oxidation that is produced especially when oxidation prone materials are irradiated in air environment. This surface oxidation can potentially influence the final structures size, shape and orientation and modify their functionality in some specific applications. In this work, we first study the influence of the laser-induced oxidation layer on the formation of LIPSS by characterizing the response of the oxidation prone hard-coating material chromium nitride. Moreover, we employ complementary surface and depth-profiling analytic techniques to reveal morphological, chemical and structural features of different types of surface structures and LIPSS produced on titanium-based substrates. Finite-difference time-domain (FDTD) calculations finally explain how this superficial oxidation layer promotes the formation of a new type of low spatial frequency LIPSS. Also, we measure the depth-extent of the different oxides formed and demonstrate its beneficial influence for friction reduction and wear resistance applications. T2 - SPIE Photonics West Conference, Symposium "Laser-Based Micro- and Nano-Processing XVI" CY - San Francisco, CA, USA DA - 22.01.2022 KW - Laser-induced periodic surface structures (LIPSS) KW - Oxidation KW - Femtosecond laser KW - Laser processing KW - Finite-difference time-domain calculations (FDTD) PY - 2022 AN - OPUS4-54322 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -