TY - JOUR A1 - Florian, Camilo A1 - Fischer, Daniel A1 - Freiberg, K. A1 - Duwe, M. A1 - Sahre, Mario A1 - Schneider, S. A1 - Hertwig, Andreas A1 - Krüger, Jörg A1 - Rettenmayr, M. A1 - Beck, Uwe A1 - Undisz, A. A1 - Bonse, Jörn T1 - Single Femtosecond Laser-Pulse-Induced Superficial Amorphization and Re-Crystallization of Silicon N2 - Superficial amorphization and re-crystallization of silicon in <111> and <100> orientation after irradiation by femtosecond laser pulses (790 nm, 30 fs) are studied using optical imaging and transmission electron microscopy. Spectroscopic imaging ellipsometry (SIE) allows fast data acquisition at multiple wavelengths and provides experimental data for calculating nanometric amorphous layer thickness profiles with micrometric lateral resolution based on a thin-film layer model. For a radially Gaussian laser beam and at moderate peak fluences above the melting and below the ablation thresholds, laterally parabolic amorphous layer profiles with maximum thicknesses of several tens of nanometers were quantitatively attained. The accuracy of the calculations is verified experimentally by high-resolution transmission electron microscopy (HRTEM) and energy dispersive X-ray spectroscopy (STEM-EDX). Along with topographic information obtained by atomic force microscopy (AFM), a comprehensive picture of the superficial re-solidification of silicon after local melting by femtosecond laser pulses is drawn. KW - Femtosecond laser KW - Silicon KW - Amorphization KW - Crystallization KW - Spectroscopic imaging ellipsometry PY - 2021 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-523687 UR - https://www.mdpi.com/1996-1944/14/7/1651 DO - https://doi.org/10.3390/ma14071651 SN - 1996-1944 VL - 14 IS - 7 SP - 1651-1 EP - 1651-21 PB - MDPI AG CY - Basel, Switzerland AN - OPUS4-52368 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Wonneberger, R. A1 - Gräf, S. A1 - Bonse, Jörn A1 - Wisniewski, W. A1 - Freiberg, K. A1 - Hafermann, M. A1 - Ronning, C. A1 - Müller, F. A. A1 - Undisz, A. T1 - Tracing the Formation of Femtosecond Laser-Induced Periodic Surface Structures (LIPSS) by Implanted Markers N2 - The generation of laser-induced periodic surface structures (LIPSS) using femtosecond lasers facilitates the engineering of material surfaces with tailored functional properties. Numerous aspects of their complex formation process are still under debate, despite intensive theoretical and experimental research in recent decades. This particularly concerns the challenge of verifying approaches based on electromagnetic effects or hydrodynamic processes by experiment. In the present study, a marker experiment is designed to conclude on the formation of LIPSS. Well-defined concentration depth profiles of 55Mn+- and 14N+-ions were generated below the polished surface of a cast Mn- and Si-free stainless steel AISI 316L using ion implantation. Before and after LIPSS generation, marker concentration depth profiles and the sample microstructure were evaluated by using transmission electron microscopy techniques. It is shown that LIPSS predominantly formed by material removal through locally varying ablation. Local melting and resolidification with the redistribution of the material occurred to a lesser extent. The experimental design gives quantitative access to the modulation depth with a nanometer resolution and is a promising approach for broader studies of the interactions of laser beams and material surfaces. Tracing LIPSS formation enables to unambiguously identify governing aspects, consequently guiding the path to improved processing regarding reproducibility, periodicity, and alignment. KW - Laser-induced periodic surface structures (LIPSS) KW - Femtosecond laser processing KW - Ion implantation KW - Transmission Electron Microscopy (TEM) KW - Stainless steel PY - 2025 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-623990 DO - https://doi.org/10.1021/acsami.4c14777 SN - 1944-8244 (Print) SN - 1944-8252 (Online) VL - 17 IS - 1 SP - 2462 EP - 2468 PB - ACS Publications AN - OPUS4-62399 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -