TY - JOUR A1 - Kormunda, M. A1 - Fischer, Daniel A1 - Hertwig, Andreas A1 - Beck, Uwe A1 - Sebik, M. A1 - Esser, N. T1 - Preparation of pulsed DC magnetron deposited Fe-doped SnO2 coatings N2 - Iron-doped SnO2 coatings were deposited in a 50 kHz DC-pulsed magnetron sputtering discharge. The pulses had a duration of 4 µs in selected gas mixtures from pure argon up to 60% of oxygen at a constant total pressure of 0.2 Pa. A single target of SnO2 with Fe inset was used. The mass spectrometry study detected the gas-related ions Ar+, O2+ and O+, where the last one becomes the dominant positive ion at higher oxygen contents. Atomic oxygen ions had a higher energy as it resulted from the collision-caused dissociation on the target surface. The tin-related species were detected as Sn+ and SnO+. SnO2+ species were not detected. The deposition rate decreased by using gas mixtures with oxygen as well as the corresponding amount of Sn-related species in the plasma. The increase of oxygen also increased significantly the sheet resistance of the films. The XPS study showed that the iron concentration decreased by using additional oxygen. But the O/Sn ratio in the coatings was constant, contrary to the increased FeO/Fe ratio in the films. An additional analysis of the coatings by spectroscopic ellipsometry has shown a dependence of the polarizability and the permittivity on the amount of oxygen used during the deposition. In contrast, the study has found no such dependence for the absorption of the layers. KW - Coatings KW - Magnetron sputtering KW - Optical properties KW - Sheet resistivity KW - SnO2 PY - 2016 UR - http://onlinelibrary.wiley.com/doi/10.1002/pssa.201532882/full U6 - https://doi.org/10.1002/pssa.201532882 SN - 0031-8965 SN - 1862-6300 VL - 213 IS - 9 SP - 2303 EP - 2309 PB - WILEY-VCH Verlag GmbH & Co. KGaA CY - Weinheim AN - OPUS4-38106 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -