TY - CONF A1 - Backes, Sebastian A1 - Fahrbach, M. A1 - Cappella, Brunero A1 - Peiner, E. T1 - Scanning characterization of polymer coating layers using contact resonance with piezoresistive microprobes N2 - The motivation and the measurement setup for large fast-scanning piezoresistive cantilevers are presented. The theory behind the measurements of mechanical properties through contact resonance is explained. Results of such measurements on two kinds of polymer are compared to results from force distance curves. Noise, time-dependency and dependency of the results on the vibration mode are identified as challenges of contact resonance. T2 - 19th International Conference and Exhibition (European Society for Precision engineering and Nanotechnology/EUSPEN) CY - Bilbao, Spain DA - 03.06.2019 KW - Force distance curves KW - Contact resonance KW - Lubricants KW - Photoresist PY - 2019 AN - OPUS4-49903 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -