TY - JOUR A1 - Fahmy, Alaa A1 - El Sabbagh, M. A1 - Bedair, M. A1 - Gangan, A. A1 - El-Sabbah, M. A1 - El-Bahy, S. A1 - Friedrich, J. T1 - One-step plasma deposited thin SiOxCy films for corrosion resistance of low carbon steel N2 - Tetraethyl orthosilicate (TEOS) was used as a chemical precursor to deposit ultra-thin SiO x C y plasma polymer films onto mild steel surfaces for preventing the corrosion process. The structure–property relationships of the coatings were evaluated by X-ray Photo Spectroscopy (XPS), X-Ray Diffraction (XRD), Fourier Transform InfraRed spectroscopy (ATR-FTIR) and Energy Dispersive X-ray spectroscopy (EDX) completed with Scanning Electron Microscopy (SEM). The SEM micrographs confirmed a pinhole-free surface morphology of the low-pressure deposited plasma polymer films. The TEOS molecules become fragmented in the plasma by numerous collisions with energy-rich electrons and heavier particles. Recombination of fragments and condensation onto the steel substrate is responsible for the formation of organic SiO containing plasma polymer layers. Such thin layers consist of predominantly SiO x structures. Their properties are determined largely by the gap distance between the two samples used as electrodes in the plasma. The efficiency of the corrosion-protecting coating was compared with uncoated samples. The corrosion protection was determined by exposure of samples to 3.5% NaCl aqueous solutions. For this purpose, polarization and Electrochemical Impedance Spectroscopy (EIS) were used to monitor the corrosion. The optimal gap distance between the electrodes was determined for corrosion protection. The best protective efficiency reached more than 97% of the total protection as measured at room temperature. KW - Thin films KW - Corrosion resistance KW - Mild steel KW - Plasma treatments KW - Tetraethyl orthosilicate PY - 2020 U6 - https://doi.org/10.1080/01694243.2020.1856539 VL - 35 IS - 16 SP - 1734 EP - 1751 PB - Taylor & Francis AN - OPUS4-52303 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -