TY - CONF A1 - Weise, Matthias A1 - Hertwig, Andreas A1 - Beck, Uwe T1 - Scanning White Light Interference Microscopy - Measurement of Topometry and Layer Thickness N2 - 3D coherence scanning interferometry (CSI) is anoptical, non-contact and rapide measurement technique using a defined bandwidth of white light at normal incidence. White light interference microscopy (WLIM) providest here-dimensional surface topometry data up to a resolution of 0.4 µm lateral and 0.1 nm vertical. Three operating modi, surface, films and advanced films, enable measurements of step heights, roughness, wear volume, cone angle, surface pattern and layer thickness. Traceability to SI system is ensured by certified standards (PTB/NIST) within a DAkkS DIN EN ISO/IEC 17025:2018 accredited lab. T2 - EFDS, V2019, Vakuum und Plasma, WS 4, Beschichtungen für Werkzeuge & Bauteile CY - Dresden, Germany DA - 08.10.2019 KW - DIN EN ISO/IEC 17025:2018 KW - Certified standards KW - White light interference microscopy(WLIM) KW - 3D coherence scanning interferometry (CSI) KW - Topometry PY - 2019 AN - OPUS4-49323 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -