TY - CONF A1 - Duwe, M. A1 - Fischer, Daniel A1 - Quast, J.-H. A1 - Schneider, S. A1 - Beck, Uwe T1 - Curved-surface metrology by imaging Mueller-matrix ellipsometry N2 - Outline - maging ellipsometry: oncept and setup - Basic theory: ellipsometry on tilted/curved surfaces - Geometric considerations - Tilt-induced cross-polarization - Application: coating analysis on microlensarray - Mueller-Matrix Imaging - Conversion to Delta-Psi Image - Layer-thickness of ITO coating T2 - 8th International conference on spectroscopic CY - Barcelona, Spain DA - 26.05.2019 KW - Spectroscopic Imaging KW - Mueller-Matrix Ellipsometry KW - Curved surfaces PY - 2019 AN - OPUS4-48366 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -