TY - CONF A1 - Beck, Uwe A1 - Griepentrog, Michael A1 - Hertwig, Andreas A1 - Sahre, Mario A1 - Unger, Wolfgang A1 - Hodoroaba, Vasile-Dan A1 - Krüger, Jörg T1 - Plasma Germany, Fachausschuss Normung, Berichtszeitraum Frühjahr 2018 - Herbst 2018 N2 - Der Vortrag gibt den aktuellen Stand der Normung im Bereich der Oberflächen-technik insbesondere der Oberflächenanalytik und der Oberflächenmess- und -prüftechnik wider. Vorgestellt wird der Status technischer Berichte, Normenentwürfe und Normen u.a. zur Charakterisierung von funktionellen Glasoberflächen für bioanalytische Anwendungen, zur Messung der Schichtdicke von Nanomaterialien mittels Ellipsometrie, zur Kalibrierung von Interferometern und Interferenzmikroskopen für die Formmessung, zur Rockwelleindringprüfung zur Bewertung der Schicht-haftung, zu den Grundlagen der Ellipsometrie, zur Messung der Schichtdicke mittels Wirbelstromverfahren, zur Schichtpotentialmessung von Mehrfach-Nickelschichten, zu Filtern und Augenschutzgeräten gegen Laserstrahlung sowie zur Bestimmung der Schichthaftung mittels Zugversuch. T2 - Fachausschuss Normung, Herbstsitzung CY - Jena, Germany DA - 06.11.2018 KW - Stand der Normung KW - Oberflächentechnik KW - Oberflächenanalytik KW - Oberflächenmesstechnik KW - Oberflächenprüftechnik PY - 2018 AN - OPUS4-48894 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Griepentrog, Michael A1 - Hertwig, Andreas A1 - Weise, Matthias T1 - White light interference microscopy, ellipsometry, and instrumented indentation testing as reference procedures N2 - The paper addresses “WHITE LIGHT INTERFERENCE MICROSCOPY, ELLIPSOMETRY, AND INSTRUMENTED INDENTATION TESTING AS REFERENCE PROCEDURES“ and is subdivided in the following sections: 1. Measurement vs. testing vs. reference procedures, 2. White light interference microscopy (WLIM) for determination of step height h, 3. Spectroscopic ellipsometry (SE) for determination of layer thickness d and 4. Instrumented indentation testing (IIT) for determination of indentation hardness HIT. The following points are discussed in more detail: methodology of measurement and testing, uncertainty budgets for direct (WLIM), model-based (SE) and formula-based (IIT) reference procedures by means of specific examples. It is shown that standardization efforts are connected to reference procedures. T2 - Referenzverfahren CY - BAM, Berlin, Germany DA - 21.02.2018 KW - Reference procedures KW - Uncertainty budgets KW - White light interference microscopy KW - Spectroscopic ellipsometry KW - Instrumented indentation testing PY - 2018 AN - OPUS4-44256 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Hertwig, Andreas A1 - Hielscher, Stefan A1 - Weise, Matthias T1 - Characterization of Materials: Uncertainty Budgets in Measurement and Testing N2 - The comprehensive knowledge of material properties as engineered and the material behavior in use is of huge importance for the functionality and reliability of processes and products. Hence, the accurate determination of material properties is a prerequisite for the applicability of a given material. Nowadays, macroscopic product features are originated by material properties on the microscopic and nanoscopic scale. This is a general challenge for uncertainty budgets in measurement and testing based on a conformity assesment. Testing labs accreditated according to DIN EN ISO/IEC 17025 have to meet these demands. This paper focuses on the measurement of physical quantities (measurand with value and unit) and on the testing of material properties (qualitative, semi-quantitative or quantitative characteristics) of solid state materials. For both measurement and testing, the expression of uncertainty according to GUM is essential. Regarding the object/sample one has to subdivide in surface and bulk features, from the measurement/testing point of view destructive vs. nondestructive procedures have to be distinguished. Moreover, direct mesurement/testing and model-based determination of quantities/properties of interest require different approaches regarding the expression of uncertainty. For surface quantities and properties as discussed here, further considerations have to be made with respect to localized (lateral extension, native or artificial) or stratified (homogeneity and isotropy) material features vs. mapping (integration area) and imaging (lateral resolution and field of analysis) specifications of the measurement/testing procedure. The concept of uncertainty budgets and the expression of uncertainty is introduced and discussed in more detail for the nondestructive model-based determination of thickness by spectroscopic ellipsometry (SE), the destructive determination of adhesion by means of centrifugal adhesion testing (CAT). It is shown that the expression of uncertainty for these examples and real materials requires different approaches resulting in either quantitity values with unit or qualitative/quantititative attributes with calculated/estimated uncertainties in agreement with GUM. T2 - The 4th International Conference on Competitive Materials and Technology Processes, ic-cmtp4, 2016 CY - Miskolc-Lillafüred, Hungary DA - 03.10.2016 KW - Measurement and testing KW - Uncertainty budgets KW - Expression of uncertainty PY - 2016 AN - OPUS4-37841 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Griepentrog, Michael A1 - Hertwig, Andreas A1 - Sahre, Mario A1 - Unger, Wolfgang A1 - Hodoroaba, Vasile-Dan A1 - Krüger, Jörg T1 - Plasma Germany, Fachausschuss Normung, Berichtszeitraum Herbst 2018 – Frühjahr 2019 N2 - Der Vortrag gibt den aktuellen Stand der Normung im Bereich der Oberflächentechnik insbesondere der Oberflächenanalytik und der Oberflächenmess- und -prüftechnik wider. Vorgestellt wird der Status technischer Berichte, Normenentwürfe und Normen u.a. zur Bewertung von Auflösung und Schärfe mit strahlbasierten Methoden im Nanometer- und Mikrometerbereich, zur Messung von Schichtdicken und Nanopartikeln in kritischen Dimensionen einschließlich Größen- und Formverteilungen mittels REM, zur Messung der Schichtdicke von Nanomaterialien und zur Klassifizierung von Kohlenstoffschichten mittels Ellipsometrie, zur Standardisierung der Ellipsometrie, zur Kalibrierung von Konfokalmikros-kopen für die Formmessung, zur linear elastisch dynamischen instrumentierten Eindringprüfung, zur Messung der flächenbezogenen Masse mittels AAS und ICP, zur Schichtpotentialmessung von Mehrfach-Nickelschichten, zur Schichtdicken und Flächen-widerstandsbestimmung sowie zur Bestimmung der Schichthaftung mittels Zentrifugentechnologie. T2 - Plasma Germany, Fachausschuss Normung, CY - Karlsruhe, Germany DA - 09.04.2019 KW - Stand der Normung KW - Oberflächenanalytik KW - Oberflächenmesstechnik KW - Qualitätssicherung PY - 2019 AN - OPUS4-48874 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Hertwig, Andreas A1 - Winkler, J. T1 - Standardization of ellipsometry N2 - The talk addresses the STANDARDIZATION OF ELLIPSOMETRY and the following points are discussed in more detail: historical background of ellipsometry, history of International Conferences on Ellipsometry, Workshops Ellipsometry in Germany and Europe, information on German/European Working Group Ellipsometry, technical/industrial importance of ellipsometry, applications on non-ideal material systems and standardization activities on ellipsometry. T2 - DIN NA Dünne Schichten für die Optik, Mainz CY - Mainz, Germany DA - 06.06.2018 KW - Standardization KW - Ellipsometry KW - Modelling KW - Accreditation PY - 2018 AN - OPUS4-45167 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Hertwig, Andreas A1 - Kormunda, M. A1 - Ryšánek, P. A1 - Ivanov, L. T1 - Characterisation of magnetron sputtered SnZnOx by means of spectroscopic ellipsometry - how can we analyse TCO materials optically? N2 - Transparent conductive oxide (TCO) films are a vital part of a large part of modern technology. The production of TCO materials has sparked much development in plasma coating technology. Quality control measurements of these layers are therefore important in many fields of optics and electronics such as high efficiency thin film photovoltaics. In this presentation, we report on optical measurements of ZnSnOx layers generated by DC/RF magnetron plasma co-sputtering. By changing the respective power on two different targets, the overall power, the gas composition and post-treatment, the properties of this type of layers can be varied in a number of parameters. The optical, electrical, and chemical properties of TCO layers are the technically most important properties together with the layer thickness. The dielectric function of layers is accessible by means of spectroscopic ellipsometry, which also yields the very important value for the layer thickness at the same time. It would be a significant step forward in quality control to use this non-destructive method also as a fast test for electrical properties. Therefore, we report on the optical properties connected to the production parameters, and also on our preliminary results connecting the optical dielectric function (in the visible and near infrared) to the electrical conductivity of the layers. We discuss the effect of deposition parameters on the optical properties of the layers and present an approach for correlating optical and electrical properties. Further, we discuss the question of accuracy of optical properties gained from model-fit-based optical methods and the use of different parameterised models for the dielectric function to achieve this. T2 - PSE 2018 - 16th Conference on Plasma Surface Engineering CY - Garmisch-Partenkirchen, Germany DA - 17.09.2018 KW - Mixed Oxides KW - TCO KW - Quality Control KW - Ellipsometry KW - Optical Constants PY - 2018 AN - OPUS4-46388 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Fischer, Daniel A1 - Hertwig, Andreas A1 - Mitzkus, Anja A1 - Sahre, Mario A1 - Weise, Matthias A1 - Köppe, Enrico A1 - Bartholmai, Matthias A1 - Basedau, Frank A1 - Hofmann, Detlef A1 - Schukar, Vivien A1 - Kormunda2, M. T1 - Multi-functional coatings for optical sensor applications: Surface plasmon resonance & magneto-optical coupling N2 - Multi-functional coatings are a key requirement for surface engineering. General demands are adhesion and long-term stability under service conditions. The modification of surfaces by means of PVD-, ECD- or hybrid processes allows an add-on functionalization of surfaces by a huge diversity of materials with both lateral and vertical micro-/nano-designs. This fact is a prerequisite for micro- and sensor-systems in lab-on-chip and sensor-on-chip technology. Two layer-based sensor principles are presented, i.e. surface plasmon resonance enhanced spectroscopic ellipsometry (SPREE) for detection of hazardous gases and magneto-optical sensors on smart-coated fiber Bragg gratings (FBG) for structural health monitoring (SHM). The interdependence of substrate features, coating properties, and layer design is discussed firstly for gas sensitivity and selectivity of SPREE-sensors and secondly for sensitivity and selectivity of magneto-strictive coatings to mechanical strain or external magnetic fields resulting in an optical displacement of the Bragg wavelength of FBG-sensors. Moreover, generic features such long-term stability, crucial process-related fabrication conditions, and effects of operational and environmental parameters are discussed with respect to the sensor performance. It has been shown that appropriate layer design and adapted selection of layer materials (SnOx/Au, Fe/Ni:SnOx/Au; Ni/NiFe-Cu-Cr) result in improved sensor parameters and may enable new sensor applications. T2 - SVC TechCon 2018 CY - Orlando, FL, USA DA - 05.05.2018 KW - Multi-functional coatings for sensors KW - Surface plasmon resonance enhanced ellipsometry (SPREE) KW - Gas monitoring KW - Magneto-optical coupling (MOC) KW - Structural health monitoring (SHM) PY - 2018 AN - OPUS4-44976 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Hertwig, Andreas A1 - Othake, N. A1 - Hiratsuka, M. T1 - Ellipsometrische Klassifizierung von Kohlenstoffschichten N2 - Der Vortrag widmet sich der „ELLIPSOMETRISCHE KLASSIFIZIERUNG VON KOHLENSTOFFSCHICHTEN“ und beschreibt die Punkte: 1. Anwendungen Kohlenstoffschichten–Carbon–based films (DLC) aus dem Vortrag N. Ohtakeet. al. (ISO TC 107, Tokyo 2017),2. Präparation der Kohlenstoffschichten für ISO TC 107 Ringversuch aus Vortrag M. Hiratsuka et. al. (ISO TC 107, Tokyo 2017), 3. Ellipsometrische Charakterisierung von Kohlenstoffschichten, Ergebnisse des Ringversuchs (ISO TC 107, Tokyo 2017) Vortrag Beck et. al. und 4.Deutsche Normungsaktivitäten national/international zur Ellipsometrie DIN NA 062-01-061 (DIN 50989-1)/TC 107 (PWI DE)“ im Einzelnen. T2 - Netzwerksymposium “schützen und Veredeln von Oberflächen”, Wildau CY - TH Wildau, Germany DA - 01.03.2018 KW - Anwendung von Kohlenstoffschichten KW - Klassifizierung von Kohlenstoffschichten KW - Ringversuch Ellipsometrie KW - Normung Ellipsometrie PY - 2018 AN - OPUS4-44340 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Griepentrog, Michael A1 - Hertwig, Andreas A1 - Hielscher, Stefan A1 - Weise, Matthias T1 - Messunsicherheiten in Messungen und Oberflächencharakterisation: Ellipsometrie, Härte und Haftprüfung N2 - Die Angabe der Messunsicherheit wird im Rahmen von Konformitätsbewertungen gefordert. Die Messunsicherheit gibt an, wie sicher der wahre Wert der Messgröße getroffen wird. Für ihre Ermittlung gibt es unterschiedliche Ansätze, allen voran der „Guide to the Expression of Uncertainty in Measurement“ (GUM). In der geplanten Auditoren- und Bewerterschulung sollen in einem Übersichtsvortrag "Uncertainty Budgets in Measurement and Testing for Surface Characterization: Ellipsometry, Hardness and Adhesion Testing" Herangehensweisen und Methoden zur Ermittlung der Messunsicherheit vorgestellt und anschließend anhand beispielhafter Anwendungen aus den Arbeitsbereichen der BAM erklärend untersetzt werden. Mit dieser Schulung sollen die Auditoren und Bewerter der BAM befähigt werden, geltende Anforderungen zur Messunsicherheit handhaben und beurteilen zu können. T2 - Auditoren- und Bewerterschulung CY - BAM, Berlin, Germany DA - 05.04.2017 KW - GUM KW - Messunsicherheit KW - Oberflächencharakterisierung KW - Ellipsometrie, Härte,und Haftung KW - Härte KW - Haftung PY - 2017 AN - OPUS4-39767 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Fischer, Daniel A1 - Hertwig, Andreas A1 - Köppe, Enriko A1 - Bartholmai, Matthias A1 - Gaal, Mate A1 - Schukar, Vivien A1 - Kreutzbruck, Marc T1 - LAYER-based Sensors for Monitoring: Surface Plasmon Resonance, Air-coupled UltraSonics, Magneto-optical Coupling N2 - The talk addresses layer-based sensors for monitoring applications. In particular, sensor principles surface plasmon resonance (SPR), air-coupled ultrasonic, and magneto-optical coupling are discussed. Optical sensors on planar substrates are prepared by sol-gel, CVD- and PVD deposition techniques, ultrasonic sensors on planar and curved substrates are made by means of PVD processes, and magnetostrictive coatings for magneto-optical sensors are deposited on fibre-based Bragg gratings (FBGs) using PVD and ECD techniques. For all kinds of sensors design and function are explained and discussed, i.e. regarding sensitivity. It is shown that a) SPR enhanced ellipsometry is a promising tool for gas monitoring of hazardous gases, that b) thermos-acoustic and piezo-electric pulse-echo techniques are relevant for damage inspection of hidden volume defects of CFRPs, and that c) magnetostrictive-optical sensors with self-calibrating (magnetic reference field) function are useful for structural health monitoring in terms of strain sensors. T2 - Vortrag im National Institute of Standards and Technology, Ceramics Division, Nanoscale Strength Measurement and Standards CY - NIST Gaithersburg, Maryland, USA DA - 28.04.2017 KW - Layer-based sensors KW - Surface plasmon resonance (SPR), KW - Air-coupled ultrasonics KW - Magneto-optical coupling KW - Gas monitoring KW - Damage inspection KW - Structural health monitoring PY - 2017 AN - OPUS4-40465 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Hiratsuka, M. A1 - Spindler, Ch. A1 - Ohtake, N. A1 - Hertwig, Andreas A1 - Becker, J. A1 - Gäbler, J. A1 - Neubert, Th. A1 - Vergöhl, M. A1 - Winkler, J. A1 - Eypert, C. T1 - Interlaboratory comparison: optical property classification of carbon-based films by ellipsometry N2 - The paper addresses the “INTERLABORATORY COMPARISON: OPTICAL PROPERTY CLASSIFICATION OF CARBON-BASED FILMS BY ELLIPSOMETRY” and the following points are discussed in more detail: Established classification for mechanical properties, Complementary classification for optical properties, Ellipsometry for determination of optical constants n-k plane as material fingerprint, Samples, participants & set-ups (samples: Japan, participants: Japan, Germany, France, set-ups: Japan, Germany, USA) and Results of interlaboratory comparison: thickness, n & k. T2 - ISO TC 107 Meeting Tokyo CY - Tokio, Japan DA - 17.01 2017 KW - Interlaboratory Comparison KW - Optical Property KW - Carbon-based Films KW - Ellipsometry PY - 2017 AN - OPUS4-39028 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Hertwig, Andreas T1 - Ringversuch zur Klassifizierung von Kohlenstoffschichten mittels Ellipsometrie N2 - Der Vortrag widmet sich dem „Ringversuch zur Klassifizierung von Kohlenstoffschichten mittels Ellipsometrie“ und beschreibt die experimentellen Eckdaten, die Ellipsometrie als Messmethode am Beispiel DLC auf Stahl, Proben vs. n-k Ebene vs. Ergebnisse des Ringversuches, messtechnische Bewertung des Ringversuches und normative Bewertung des Ringversuches sowie Schlussfolgerungen. T2 - 9. Sitzung DIN NA 062-01-64 „Kohlenstoffschichten“ CY - Berlin, Deutschland DA - 09.05.2016 KW - Amorphe Kohlenstoffschichten KW - Optische Konstanten KW - Ellipsometrie KW - Klassifizierungssystem PY - 2016 AN - OPUS4-38041 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Unger, Wolfgang A1 - Griepentrog, Michael A1 - Hertwig, Andreas T1 - Plasma Germany, Fachausschuss Normung, Herbstsitzung 2016 N2 - Der Stand der Normung im Bereich der Oberflächentechnik wird zusammengefasst. Aktuelle Normungsvorhaben zur chemischen Oberflächenanalyse, Rastersondenmikroskopie, Nanotechnologie, Oberflächenmesstechnik im Mikro- und Nanobereich, für Anwendungen von Kohlenstoffschichten sowie von Mess- und Prüfverfahren für metallische und anorganische Überzüge werden vorgestellt. Ein Ringversuch zur Klassifizierung von Kohlenstoffschichten mittels Ellipsometrie wird diskutiert. Abschließend wird das DIN-Terminologie Portal erläutert. T2 - Lenkungsausschuss von Plasma Germany, Fachausschuss Normung, Herbstsitzung 2016 CY - Stuttgart, Germany DA - 27.10.2016 KW - Stand der Normung KW - Oberflächentechnik KW - Schichttechnik PY - 2016 AN - OPUS4-38068 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Fischer, Daniel A1 - Hertwig, Andreas A1 - Hidde, Gundula A1 - Stockmann, Jörg M. A1 - Weise, Matthias T1 - Ellipsometric imaging of low-contrast surface modifications and depolarization contrast imaging (DCI) of particulate accumulations N2 - Imaging of surfaces regarding topographical, morphological, micro-structural, and chemical features is a key requirement for quality control for the identification of contaminated, degraded, damaged or deliberately modified surface areas vs. clean, virgin, undamaged or unmodified regions. As optical functions may represent any of these changes on the micro- and nano-scale, imaging ellipsometry (IE) is the technique of choice using either intensity, phase, or/and amplitude contrast for visualization of low-contrast surface modifications [1, 2]. Defects or surface and film features whether native or artificial, intended or unintended, avoidable or unavoidable as well as surface pattern are of interest for quality control. In contrast to microscopic techniques operated at normal incidence, ellipsometry as oblique-incidence technique provides improved contrast for vertically nano-scaled add-on or sub-off features such as ultra-thin transparent films, metallic island films, carbon-based thin films, laser modification or laser induced damage, dried stain, cleaning agent or polymeric residue. Two-sample reference techniques, i.e. referenced spectroscopic ellipsometry (RSE) may further increase sensitivity and decrease measurement time. In case of particulate accumulations depolarization contrast imaging (DCI) may improve the lateral resolution beyond the Abbe limit. This has been proven for silica spheres as reference in terms of single particles, particulate accumulations or particulate monolayers and layer stacks. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) were used for reference measurements of particle diameter, particle height, or particulate layer/accumulation thickness. It has been shown that single silica particles of 250 nm in diameter, i.e. at least a factor of 4 better than the lateral resolution limit as of now, can be visualized on even substrates. However, the ellipsometric measurement of particle diameters of this size needs further efforts interpretation. T2 - Workshop Ellipsometry 2018 CY - Chemnitz, Germaný DA - 19.03.2018 KW - Low-contrast surface modifications KW - Particulate distributions KW - Imaging ellipsometry(IE) KW - Depolarization contrast imaging (DCI) PY - 2018 AN - OPUS4-44548 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Hertwig, Andreas A1 - Winkler, J. T1 - Preliminary work item (PWI) 23131 on standardization of ellipsometry N2 - The paper addresses the PRELIMINARY WORK ITEM (PWI) 23131 ON STANDARDIZATION OF ELLIPSOMETRY and the following points are discussed in more detail: Historical background of ellipsometry, Technical/industrial importance of ellipsometry and Standardization activities on ellipsometry. T2 - ISO TC 107 and JWG 4 meeting CY - Levi, Finland DA - 23.01.2018 KW - Standardization KW - Ellipsometrie KW - Modelling KW - Accreditation PY - 2018 AN - OPUS4-43959 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Baier, Jennifa A1 - Fischer, Daniel A1 - Griepentrog, Michael A1 - Hertwig, Andreas A1 - Hielscher-Hofinger, Stefan A1 - Sahre, Mario A1 - Stockmann, Jörg Manfred A1 - Weise, Matthias T1 - Mapping und Imaging modifizierter Oberflächen: Generische Kenngrößen, Fehlstellen, Reinigungszustand und Haftfestigkeit N2 - Der Vortrag widmet sich dem Mapping und Imaging modifizierter Oberflächen: Generische Kenngrößen, Fehlstellen, Reinigungszustand und Haftfestigkeit. Es werden Untersuchungsmethoden zu ihrer Prüfung dargestellt. T2 - 37. ak-adp 2021, Jena CY - Online meeting DA - 16.06.2021 KW - Qualitätssicherung KW - Mapping modifizierter Oberflächen KW - Generische Kenngrößen KW - Haftfestigkeit KW - Klebfestigkeit PY - 2021 AN - OPUS4-52870 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Griepentrog, Michael A1 - Hertwig, Andreas A1 - Hielscher-Hofinger, Stefan A1 - Lange, Thorid A1 - Weise, Matthias T1 - Uncertainty budgets in surface technology: stepheigt, layerthickness, indentation hardness, adehesive strength N2 - The object (sample) and the measurement/testing procedure may always have unknown degrees of freedom, i.e. instead of 𝐯 ≥ n – 1 in many cases 𝐯 ≫ n - 1 may apply, in particular in the micro- and nano-world! T2 - 10. VDI-Fachtagung, Messunsicherheit und Prüfprozesse CY - Erfurt, Germany DA - 10.11.2021 KW - Methodology in metrology KW - Methodology in testing KW - Spectroscopic Ellipsometry KW - Instrumented Indentation Testing (IIT) KW - Centrifugal Adhesion Testing (CAT) PY - 2021 AN - OPUS4-53986 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Unger, Wolfgang A1 - Hodoroaba, Vasile-Dan A1 - Griepentrog, Michael A1 - Hertwig, Andreas T1 - Herbstsitzung Plasma Germany 2017, Frohnhausen N2 - Der Vortrag widmet sich den Normenentwicklungen auf den Gebieten der • Chemische Oberflächenanalyse und Rastersondenmikroskopie • Elektronenmikroskopie und Mikrobereichsanalyse • Prüfverfahren (zu Nanotechnologien) • Hardness Testing • Oberflächenmesstechnik im Mikro- und Nanobereich • Kohlenstoff- und keramische Hartstoffschichten • Mess- und Prüfverfahren für Schichten und Schichtsysteme • Dünne Schichten für die Optik • Coating Qualification Tests T2 - FA_NORMUNG_PLASMA_GERMANY CY - Frohnhausen, Germany DA - 08.11.2017 KW - Normen KW - Oberflächentechnik KW - Oberflächenanalytik KW - Oberflächenmesstechnik PY - 2017 AN - OPUS4-42821 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Griepentrog, Michael A1 - Hertwig, Andreas A1 - Hielscher-Hofinger, Stefan A1 - Weise, Matthias T1 - Mechanische, topometrische und optische Charakterisierung von Schichten mit Stand der Normung N2 - Der Vortrag „MECHANISCHE, TOPOMETRISCHE UND OPTISCHE CHARAKTERISIERUNG VON SCHICHTEN MIT STAND DER NORMUNG“ widmet sich unterschiedlichen Beschichtungssystemen und deren mechanischer, topometrischer und optischer Charakterisierung. Über die entsprechenden aktuellen Normen wird informiert. Es betrifft Verfahren wie die Instrumentierte Eindringprüfung (IIT), Centrifugal Adhesion Testing, Weißlichtinterferenzmikroskopie, Tastschnittverfahren und Ellipsometrie (SE). T2 - EFDS, V2019, Vakuum und Plasma CY - Dresden, Germany DA - 08.10.2019 KW - Normung KW - Spektrale Ellipsometrie (SE) KW - Instrumentierte Eindringprüfung (IIT) KW - Centrifugal Adhesion Testing (CAT) KW - Weißlichtinterferenzmikroskopie (WLIM, 3D) PY - 2019 AN - OPUS4-49320 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -