TY - CONF A1 - Beck, Uwe A1 - Fischer, Daniel A1 - Hertwig, Andreas A1 - Mitzkus, Anja A1 - Sahre, Mario A1 - Weise, Matthias A1 - Köppe, Enrico A1 - Bartholmai, Matthias A1 - Basedau, Frank A1 - Hofmann, Detlef A1 - Schukar, Vivien A1 - Kormunda2, M. T1 - Multi-functional coatings for optical sensor applications: Surface plasmon resonance & magneto-optical coupling N2 - Multi-functional coatings are a key requirement for surface engineering. General demands are adhesion and long-term stability under service conditions. The modification of surfaces by means of PVD-, ECD- or hybrid processes allows an add-on functionalization of surfaces by a huge diversity of materials with both lateral and vertical micro-/nano-designs. This fact is a prerequisite for micro- and sensor-systems in lab-on-chip and sensor-on-chip technology. Two layer-based sensor principles are presented, i.e. surface plasmon resonance enhanced spectroscopic ellipsometry (SPREE) for detection of hazardous gases and magneto-optical sensors on smart-coated fiber Bragg gratings (FBG) for structural health monitoring (SHM). The interdependence of substrate features, coating properties, and layer design is discussed firstly for gas sensitivity and selectivity of SPREE-sensors and secondly for sensitivity and selectivity of magneto-strictive coatings to mechanical strain or external magnetic fields resulting in an optical displacement of the Bragg wavelength of FBG-sensors. Moreover, generic features such long-term stability, crucial process-related fabrication conditions, and effects of operational and environmental parameters are discussed with respect to the sensor performance. It has been shown that appropriate layer design and adapted selection of layer materials (SnOx/Au, Fe/Ni:SnOx/Au; Ni/NiFe-Cu-Cr) result in improved sensor parameters and may enable new sensor applications. T2 - SVC TechCon 2018 CY - Orlando, FL, USA DA - 05.05.2018 KW - Multi-functional coatings for sensors KW - Surface plasmon resonance enhanced ellipsometry (SPREE) KW - Gas monitoring KW - Magneto-optical coupling (MOC) KW - Structural health monitoring (SHM) PY - 2018 AN - OPUS4-44976 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Hertwig, Andreas A1 - Winkler, J. T1 - Standardization of ellipsometry N2 - The talk addresses the STANDARDIZATION OF ELLIPSOMETRY and the following points are discussed in more detail: historical background of ellipsometry, history of International Conferences on Ellipsometry, Workshops Ellipsometry in Germany and Europe, information on German/European Working Group Ellipsometry, technical/industrial importance of ellipsometry, applications on non-ideal material systems and standardization activities on ellipsometry. T2 - DIN NA Dünne Schichten für die Optik, Mainz CY - Mainz, Germany DA - 06.06.2018 KW - Standardization KW - Ellipsometry KW - Modelling KW - Accreditation PY - 2018 AN - OPUS4-45167 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Hidde, Gundula A1 - Lange, Thorid A1 - Gargouri, H. A1 - Kärkkänen, I. A1 - Naumann, F. T1 - Plasma Activation and Plasma-assisted ALD Surface Modification of Polymers for Improved Bonding and Adhesive Strength N2 - Bonding strength is crucial on polymers of low surface energy, for clean surfaces limited to 0.5, 1, and 2 MPa for PTFE, PP, and PE. Plasma treatment may improve bonding strength by a factor of 2 (PTFE) or 5 (PP and PE). The efficiency of treatment is usually 10% as both low pressure and atmospheric pressure processes show low topographic conformity. Besides, lifetime of activation/modification is rather short. Hence, bonding has to be carried out immediately after plasma treatment. The concept of plasma-assisted ALD (atomic layer deposition) interlayers was introduced in the project HARFE of SENTECH (modification/deposition/in-situ monitoring) and BAM (bonding, characterization, testing). ALD deposition has a high surface conformity and for dielectric films of Al2O3 also a good long-term stability given that the films are dense enough. Based on TMA and O2/O3 precursors, ALD layer stacks from 60 to 375 monolayers were prepared under different conditions. For a transfer time of 24 hours from deposition to measurement, bonding strength could be increased up to 5 MPa (PTFE) respectively 10 MPa (PP, PE). The huge potential of ALD layers as adhesive interlayers was demonstrated for Al2O3 on stainless steel with bonding strength beyond 15 MPa, i.e. interface strength within the ALD stack is also in this range. This is a prerequisite for subsequent PVD/CVD-deposition in hybrid systems. By means of the SI ALD LL system of SENTECH thermal and plasma-supported ALD processes can be alternatively realized. Ellipsometric in-situ monitoring provides monolayer sensitivity and reveals that the efficient bonding of the lower ALD layers on the polymer has to be further improved. Testing of bonding strength was realized by CAT (centrifugal adhesion testing) technology. It was shown that ALD modification correlates with the increase of surface energy and bonding strength. T2 - PSE 2018 - 16th Conference on Plasma Surface Engineering CY - Garmisch-Partenkirchen, Germany DA - 17.09.2018 KW - Plasma activation KW - Plasma-assisted ALD modification KW - Adhesive ALD interlayer KW - Bonding strength KW - Adhesive strength PY - 2018 AN - OPUS4-46015 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Hertwig, Andreas A1 - Kormunda, M. A1 - Ryšánek, P. A1 - Ivanov, L. T1 - Characterisation of magnetron sputtered SnZnOx by means of spectroscopic ellipsometry - how can we analyse TCO materials optically? N2 - Transparent conductive oxide (TCO) films are a vital part of a large part of modern technology. The production of TCO materials has sparked much development in plasma coating technology. Quality control measurements of these layers are therefore important in many fields of optics and electronics such as high efficiency thin film photovoltaics. In this presentation, we report on optical measurements of ZnSnOx layers generated by DC/RF magnetron plasma co-sputtering. By changing the respective power on two different targets, the overall power, the gas composition and post-treatment, the properties of this type of layers can be varied in a number of parameters. The optical, electrical, and chemical properties of TCO layers are the technically most important properties together with the layer thickness. The dielectric function of layers is accessible by means of spectroscopic ellipsometry, which also yields the very important value for the layer thickness at the same time. It would be a significant step forward in quality control to use this non-destructive method also as a fast test for electrical properties. Therefore, we report on the optical properties connected to the production parameters, and also on our preliminary results connecting the optical dielectric function (in the visible and near infrared) to the electrical conductivity of the layers. We discuss the effect of deposition parameters on the optical properties of the layers and present an approach for correlating optical and electrical properties. Further, we discuss the question of accuracy of optical properties gained from model-fit-based optical methods and the use of different parameterised models for the dielectric function to achieve this. T2 - PSE 2018 - 16th Conference on Plasma Surface Engineering CY - Garmisch-Partenkirchen, Germany DA - 17.09.2018 KW - Mixed Oxides KW - TCO KW - Quality Control KW - Ellipsometry KW - Optical Constants PY - 2018 AN - OPUS4-46388 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Hielscher, Stefan A1 - Lange, Thorid A1 - Rietz, U. A1 - Lerche, D. T1 - State-of-the-Art in Multiple-Sample Evaluation of Adhesive and Bonding Strength N2 - The paper addresses the “State-of-the-Art in Multiple-Sample Evaluation of Adhesive and Bonding Strength” and the following points are discussed in more detail: 1. Motivation (coatings, varnishes, tapes, laminates, CFRP, adhesive-bonded joints) 2. Conventional single-sample testing (evaluation of adhesive and bonding strength; failure pattern) 3. Multiple-sample handling (MSH), bonding (MSB), and testing: centrifugal adhesion testing (CAT) (multiple-sample approach, tensile test within a centrifuge) 4. Application examples of CAT-Technology™ (laminates, optical coatings, CFRP joints) Finally, a summary is given regarding status quo and benefits of CAT-technology under tensile stress conditions whereas examples of testing in a centrifuge under compressive stress conditions are mentioned in the outlook. T2 - The 5th International Conference Competitive Materials and Technology Processes CY - Miskolc-Lillafüred, Hungary DA - 08.10.2018 KW - Centrifugal Adhesion Testing KW - CAT KW - Multiple-sample handling (MSH) KW - Multiple-sample bonding (MSB) KW - Tensile strength of laminates KW - Tensile strength of coatings KW - Adhesive strength KW - Bonding strength PY - 2018 AN - OPUS4-46336 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Hiratsuka, M. A1 - Spindler, Ch. A1 - Ohtake, N. A1 - Hertwig, Andreas A1 - Becker, J. A1 - Gäbler, J. A1 - Neubert, Th. A1 - Vergöhl, M. A1 - Winkler, J. A1 - Eypert, C. T1 - Interlaboratory comparison: optical property classification of carbon-based films by ellipsometry N2 - The paper addresses the “INTERLABORATORY COMPARISON: OPTICAL PROPERTY CLASSIFICATION OF CARBON-BASED FILMS BY ELLIPSOMETRY” and the following points are discussed in more detail: Established classification for mechanical properties, Complementary classification for optical properties, Ellipsometry for determination of optical constants n-k plane as material fingerprint, Samples, participants & set-ups (samples: Japan, participants: Japan, Germany, France, set-ups: Japan, Germany, USA) and Results of interlaboratory comparison: thickness, n & k. T2 - ISO TC 107 Meeting Tokyo CY - Tokio, Japan DA - 17.01 2017 KW - Interlaboratory Comparison KW - Optical Property KW - Carbon-based Films KW - Ellipsometry PY - 2017 AN - OPUS4-39028 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Fischer, Daniel A1 - Hertwig, Andreas A1 - Köppe, Enriko A1 - Bartholmai, Matthias A1 - Gaal, Mate A1 - Schukar, Vivien A1 - Kreutzbruck, Marc T1 - LAYER-based Sensors for Monitoring: Surface Plasmon Resonance, Air-coupled UltraSonics, Magneto-optical Coupling N2 - The talk addresses layer-based sensors for monitoring applications. In particular, sensor principles surface plasmon resonance (SPR), air-coupled ultrasonic, and magneto-optical coupling are discussed. Optical sensors on planar substrates are prepared by sol-gel, CVD- and PVD deposition techniques, ultrasonic sensors on planar and curved substrates are made by means of PVD processes, and magnetostrictive coatings for magneto-optical sensors are deposited on fibre-based Bragg gratings (FBGs) using PVD and ECD techniques. For all kinds of sensors design and function are explained and discussed, i.e. regarding sensitivity. It is shown that a) SPR enhanced ellipsometry is a promising tool for gas monitoring of hazardous gases, that b) thermos-acoustic and piezo-electric pulse-echo techniques are relevant for damage inspection of hidden volume defects of CFRPs, and that c) magnetostrictive-optical sensors with self-calibrating (magnetic reference field) function are useful for structural health monitoring in terms of strain sensors. T2 - Vortrag im National Institute of Standards and Technology, Ceramics Division, Nanoscale Strength Measurement and Standards CY - NIST Gaithersburg, Maryland, USA DA - 28.04.2017 KW - Layer-based sensors KW - Surface plasmon resonance (SPR), KW - Air-coupled ultrasonics KW - Magneto-optical coupling KW - Gas monitoring KW - Damage inspection KW - Structural health monitoring PY - 2017 AN - OPUS4-40465 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Hertwig, Andreas A1 - Hielscher, Stefan A1 - Weise, Matthias T1 - Characterization of Materials: Uncertainty Budgets in Measurement and Testing N2 - The comprehensive knowledge of material properties as engineered and the material behavior in use is of huge importance for the functionality and reliability of processes and products. Hence, the accurate determination of material properties is a prerequisite for the applicability of a given material. Nowadays, macroscopic product features are originated by material properties on the microscopic and nanoscopic scale. This is a general challenge for uncertainty budgets in measurement and testing based on a conformity assesment. Testing labs accreditated according to DIN EN ISO/IEC 17025 have to meet these demands. This paper focuses on the measurement of physical quantities (measurand with value and unit) and on the testing of material properties (qualitative, semi-quantitative or quantitative characteristics) of solid state materials. For both measurement and testing, the expression of uncertainty according to GUM is essential. Regarding the object/sample one has to subdivide in surface and bulk features, from the measurement/testing point of view destructive vs. nondestructive procedures have to be distinguished. Moreover, direct mesurement/testing and model-based determination of quantities/properties of interest require different approaches regarding the expression of uncertainty. For surface quantities and properties as discussed here, further considerations have to be made with respect to localized (lateral extension, native or artificial) or stratified (homogeneity and isotropy) material features vs. mapping (integration area) and imaging (lateral resolution and field of analysis) specifications of the measurement/testing procedure. The concept of uncertainty budgets and the expression of uncertainty is introduced and discussed in more detail for the nondestructive model-based determination of thickness by spectroscopic ellipsometry (SE), the destructive determination of adhesion by means of centrifugal adhesion testing (CAT). It is shown that the expression of uncertainty for these examples and real materials requires different approaches resulting in either quantitity values with unit or qualitative/quantititative attributes with calculated/estimated uncertainties in agreement with GUM. T2 - The 4th International Conference on Competitive Materials and Technology Processes, ic-cmtp4, 2016 CY - Miskolc-Lillafüred, Hungary DA - 03.10.2016 KW - Measurement and testing KW - Uncertainty budgets KW - Expression of uncertainty PY - 2016 AN - OPUS4-37841 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -