TY - CONF A1 - Bonse, Jörn T1 - Single Femtosecond Laser Pulse induced Amorphization, Re-crystallization and Native Oxide Removal at Silicon Wafer Surfaces N2 - Single femtosecond laser pulse induced amorphization, re-crystallization and native oxide layer removal at silicon wafer surfaces of different crystal orientation is studied via spectroscopic imaging ellipsometry, atomic force microscopy, and high-resolution transmission electron microscopy. T2 - 2023 Conference on Lasers and Electro-Optics/Europe – European Quantum Electronics Conferences CY - Munich, Germany DA - 26.06.2023 KW - Femtosecond laser KW - Laser-induced amorphization KW - Spectroscopic imaging ellipsometry KW - Transmission electron microscopy KW - Native oxide layer PY - 2023 AN - OPUS4-57829 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Omar, Hassan T1 - Growth Kinetics and Molecular Mobility of the Adsorbed Layer of Poly(bisphenol-A Carbonate) (PBAC), Polysulfone (PSU), and Poly (2-Vinyl Pyridine) (P2VP) N2 - Interactions between a polymer and a substrate interface play a vital role in understanding the improvement in thin film material properties as well as serving as a model for nanocomposites. For any non-repulsive polymer-substrate interactions, polymer segments form an irreversibly adsorbed layer and show a slowdown in the glassy dynamics and thus an increase in the thermal glass transition temperature compared to the bulk-like values. The growth kinetics of the adsorbed layer showed a deviation for both poly (bisphenol-A carbonate) (PBAC) and polysulfone (PSU), two bulky polymers containing a functional group (phenyl ring) in the backbone, compared to conventional polymers previously studied like poly-2-vinyl pyridine (P2VP). This deviation was attributed to the bulkiness of the phenyl rings. . Further investigations into the influence of the adsorbed layer on glassy dynamics were conducted. The molecular mobility and glass transition for thin films of PBAC and PSU were compared to bulk samples of each polymer. Broadband dielectric spectroscopy, atomic force microscopy, and ellipsometry were primarily used and additionally supported by sum frequency generation spectroscopy. T2 - Deutsche Physikalische Gesellschaft (DPG) Tagung CY - Berlin, Germany DA - 17.03.2024 KW - Thin films KW - Adsorbed Layer KW - Atomic Force Microscopy KW - Ellipsometry KW - Dielectric Spectroscopy PY - 2024 AN - OPUS4-59821 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Lindemann, Franziska T1 - Bestimmung der spezifischen Oberfläche mittels Gasadsorption (BET-Verfahren) N2 - Im Rahmen des 2. BAM-Akademie Info-Tages "Nano or not Nano" wurde die OECD TG 124 "Volume Specific Surface Area of Manufactured Nanomaterials" vorgestellt. Der Vortrag beschreibt die Bestimmung der spezifischen Oberfläche von dispersen und/oder porösen Pulvern mittels Gasadsorption nach dem BET-Verfahren. Es wird auf die Anwendbarkeit der Methode eingegangen und es werden praktische Hinweise zur Probenvorbereitung und Messung von Nanomaterialien gegeben. T2 - BAM Akademie II: Info-Tage "Nano or not Nano" CY - Online meeting DA - 25.01.2024 KW - OECD TG 124 KW - Nanopulver KW - VSSA KW - Nano powder KW - BET KW - Spezifische Oberfläche PY - 2024 AN - OPUS4-59623 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Hertwig, Andreas T1 - Ellipsometry as a production measurement tool N2 - Spectroscopic Ellipsometry is an enormously versatile measurement tool for surfaces and thin layers. We discuss the use of ellipsometry in the context of quality control in production processes of eletrconic devices. T2 - Photonics Days Berlin Brandenburg CY - Berlin, Germany DA - 09.10.2023 KW - Ellipsometry KW - Quality control KW - Metrology PY - 2023 AN - OPUS4-59837 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Ermilova, Elena T1 - Multi-scale optical imaging methods for quality control of electronic devices N2 - The presentation demonstrates an application of multi-scale optical imaging methods such as spectroscopic imaging ellipsometry and white light interference microscopy for the investigation of wide-bandgap semiconductors for power electronics. The capabilities of these methods for the development of new reference calibration samples for scanning microwave microscopes (SMM) and conductive atomic force microscopes (C AFM) are discussed. T2 - Photonics Days Berlin Brandenburg 2023 CY - Berlin, Germany DA - 09.10.2023 KW - Imaging ellipsometry KW - White light interference microscopy KW - Power electronics KW - Reference standards KW - Metrology KW - Nanoelectronics PY - 2023 AN - OPUS4-59838 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Kuchenbecker, Petra T1 - Bestimmung der Skelettdichte mittels Gaspyknometrie N2 - Im Rahmen des 2. BAM-Akademie Info-Tages "Nano or not Nano" wurde die OECD TG 124 "Volume Specific Surface Area of Manufactured Nanomaterials" vorgestellt. Der Vortrag beschreibt detailliert das Messverfahren der He-Gaspyknometrie zur Bestimmung der Skelettdichte von Pulvern und geht auf Anwendbarkeit, Besonderheiten bei Nanopulvern und wichtige Einstellparameter für die Messung ein. T2 - BAM Akademie II: Info-Tage "Nano or not Nano" CY - Online meeting DA - 25.01.2024 KW - Pycnometry KW - Density KW - Nano powder PY - 2024 AN - OPUS4-59561 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Kuchenbecker, Petra T1 - Einführung: Volume Specific Surface Area (VSSA) N2 - Im Rahmen der 2. BAM-Akademie-Veranstaltung "Nano or not Nano" wurde die OECD TG 124 "Volume Specific Surface Area of Manufactured Nanomaterials" vorgestellt. Der Vortrag enthält ein Einführung zur VSSA mit Definitionen, Vorteilen und Einschränkungen. T2 - BAM Akademie II: Info-Tage "Nano or not Nano" CY - Online meeting DA - 25.01.2024 KW - Nano powder KW - VSSA KW - Specific surface KW - OECD TG PY - 2024 AN - OPUS4-59560 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Kuchenbecker, Petra T1 - Herausforderungen bei der Granulometrie von (technischen) Nano-Pulvern N2 - Einführungsvortrag im Rahmen der Veranstaltung der BAM-Akademie zur Anwendung der OECD TG 124 "Volume Specific Surface Area of Manufactured Nanomaterials" zu Herausforderungen bei der Granulometrie von Nanopulvern. Es werden die Einflüsse von Partikelform, Breite der Partikelgrößenverteilung und Agglomeration/ Aggregation auf das Messergebnis sowie die Vergleichbarkeit der Ergebnisse verschiedener Messverfahren dargelegt. T2 - BAM Akademie II: Info-Tage "Nano or not Nano" CY - Online meeting DA - 25.01.2024 KW - Nanopulver KW - Granulometrie KW - Partikelgröße KW - VSSA KW - OECD TG 124 PY - 2024 AN - OPUS4-59558 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Erzeugung und Charakterisierung anisotroper Nanostrukturen durch Ultrakurzpulslaser N2 - Der Vortrag gibt einen Überblick über die Erzeugung und Charakterisierung anisotroper Nanostrukturen mittels ultrakurzgepulster Laserstrahlung. Besonderes Augenmerk liegt dabei auf dem Phänomen der sogenannten Laser-induzierten periodischen Oberflächen-Nanostrukturen auf dielektrischen Werkstoffen und ihrer zeitlichen Dynamik. Weitere Beispiele von Volumen-Nanostrukturen aus der Literatur werden diskutiert. T2 - 21. Treffen des DGG-DKG Arbeitskreises „Glasig-kristalline Multifunktionswerkstoffe“ CY - Mainz, Germany DA - 22.02.2024 KW - Laser-induzierte periodische Oberflächen-Nanostrukturen KW - Quarzglas KW - Saphir KW - Bessel-Strahlen PY - 2024 AN - OPUS4-59565 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Hertwig, Andreas T1 - Ellipsometry as a tool for electrical metrology - Referencing electrical properties of thin layers with TCO materials N2 - Ellipsometry is a highly valuable technology for bridging different measurement methods. As a fast, highly sensitive, and non-destructive optical technique with low environmental requirements, it is ideal for transporting measurement accuracy and for up-scaling measurements in the production environment. It can be used for highly precise determination of properties, material identity and correctness confirmation, as well as defect detection. Comparable, traceable, and accurate electrical measurements, especially at small scales are one of the biggest challenges in the development of the electrical and electronic devices of the future. In this project, we develop structured thin layer systems of the transparent conductive material indium tin oxide (ITO) to prove the concept of using these systems as standards for conductivity and permittivity. The layers are produced in a reactive magnetron sputtering process from raw ITO targets with additional oxidation achieved by oxygen injection. We present results of a study correlating the coating process conditions with the properties of the final layer material. We found that especially the temperature development during coating is of key importance and determines the layer properties to a large extent. We will discuss questions of homogeneity and reproducibility of the coating processes used. The finished layers undergo lithographic structuring and etching to produce patterns to serve as reference structures for scanning probe electrical measurements. TCOs have a large variety of applications. In this work we also study the usability of ITO for other purposes and investigate the stability of this material under application conditions. T2 - 12th Workshop Ellipsometry 2023 CY - Prague, Czech Republic DA - 18.09.2023 KW - Thin Films KW - Transparent Conductive Oxides KW - Ellipsometry KW - Electrical Properties KW - Nanoelectronics PY - 2023 AN - OPUS4-58410 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -