TY - CONF A1 - Schade, U. A1 - Puskar, L. A1 - Golnak, R. A1 - Veber, A. A1 - Beckmann, Jörg T1 - Infrared Attenuate Total Reflection Cell with a Functionalized Surface T2 - Proceedings of the 48th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) N2 - ATR cell utilizing chips from silicon wafers is discussed. The cell can be used for wet-chemical analysis on functionalized surfaces. Here, silicon chips are exemplarily "functionalized" by silica layers to provide a hydrophilic or hydrophobic ATR surface in-situ. T2 - 48th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) CY - Montreal, Quebec, Canada DA - 17.09.2023 KW - THz radiation KW - ATR KW - FTIR PY - 2023 DO - https://doi.org/10.1109/IRMMW-THz57677.2023.10298918 SP - 1 PB - IEEE CY - New York, NY AN - OPUS4-59326 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -