TY - JOUR A1 - Mitzkus, Anja A1 - Sahre, Mario A1 - Basedau, Frank A1 - Hofman, Detlef A1 - Beck, Uwe T1 - Fiber Bragg Gratings for In-Situ Stress Monitoring of Electrochemical Deposition N2 - The in-situ monitoring of electrochemical deposition (ECD) processes is still a challenge regarding the measurement of the effective temperature of the substrate and the formation of mechanical stress in the layer under given plating conditions. Monitoring problems can be solved by applying a pre-coated fiber Bragg grating (FBG) to the electrolytic process as the shift of the Bragg wavelength is affected by both the temperature of the electrolyte near the substrate and the stress formation in the growing layer. The experimental FBG set-up and the quantitative determination of temperature- and stress-related strain is described for a nickel-iron electrolyte. KW - Fiber Bragg grating (FBG) KW - Electrochemical deposition (ECD) KW - Optical fibers PY - 2019 U6 - https://doi.org/10.1149/2.0111906jes SN - 0013-4651 VL - 166 IS - 6 SP - B312 EP - B315 PB - Electrochemical Society CY - Pennington, NJ AN - OPUS4-47738 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -